Display substrate and manufacturing method thereof, display device

ABSTRACT

A display substrate and a manufacturing method thereof and a display device are provided. The display substrate includes a base substrate and sub-pixels on the base substrate. The sub-pixels are arranged in a sub-pixel array. At least one sub-pixel includes a first transistor, a second transistor, a third transistor and a storage capacitor. The first electrode of the third transistor is electrically connected to an active layer of the third transistor through a first via hole, and the first electrode of the third transistor is configured to be electrically connected to the light emitting element through a second via hole; the first via hole and the second via hole are at least partially overlapped with each other in a direction perpendicular to the base substrate.

TECHNICAL FIELD

The present disclosure relates to a display substrate and amanufacturing method thereof, and a display device.

BACKGROUND

In the field of Organic Light Emitting Diode (OLED) display, with therapid development of high-resolution products, higher requirements areput forward on the structural design of a display substrate, such as thearrangement of pixels and signal lines.

SUMMARY

At least an embodiment of the present disclosure provides a displaysubstrate comprising a base substrate and a plurality of sub-pixels onthe base substrate. The plurality of sub-pixels are arranged in asub-pixel array in a first direction and a second direction, the firstdirection intersecting with the second direction, at least one of theplurality of sub-pixels comprises a first transistor, a secondtransistor, a third transistor, and a storage capacitor on the basesubstrate, a first electrode of the second transistor is electricallyconnected to the first capacitor electrode of the storage capacitor anda gate electrode of the first transistor, a second electrode of thesecond transistor is configured to receive a data signal, a gateelectrode of the second transistor is configured to receive a firstcontrol signal, and the second transistor is configured to write thedata signal to the gate electrode of the first transistor and thestorage capacitor in response to the first control signal, a firstelectrode of the first transistor is electrically connected to a secondcapacitor electrode of the storage capacitor and configured to beelectrically connected to a light emitting element, a second electrodeof the first transistor is configured to receive a first power voltage,and the first transistor is configured to control a current for drivingthe light emitting element under control of a voltage of the gateelectrode of the first transistor, a first electrode of the thirdtransistor is electrically connected with the first electrode of thefirst transistor and the second capacitor electrode of the storagecapacitor, a second electrode of the third transistor is configured tobe connected with a detection circuit, a gate electrode of the thirdtransistor is configured to receive a second control signal, and thethird transistor is configured to detect an electrical characteristic ofthe sub-pixel to which the third transistor belongs by the detectioncircuit in response to the second control signal; the first electrode ofthe third transistor is electrically connected to an active layer of thethird transistor through a first via hole, and the first electrode ofthe third transistor is configured to be electrically connected to thelight emitting element through a second via hole;

In some examples, the first via hole and the second via hole are atleast partially overlapped with each other in a direction perpendicularto the base substrate.

In some examples, the first electrode of the third transistor iselectrically connected to the second capacitor electrode through a thirdvia hole.

In some examples, the third via hole and the active layer of the thirdtransistor are not overlapped in the direction perpendicular to the basesubstrate.

In some examples, a minimum distance between an orthographic projectionof the third via hole on the base substrate and an orthographicprojection of the active layer of the third transistor on the basesubstrate ranges from 0.5 μm to 6 μm.

In some examples, the first electrode of the third transistor is furtherelectrically connected to the second capacitor electrode through thefirst via hole.

In some examples, the third via hole is not overlapped with the firstcapacitor electrode in the direction perpendicular to the basesubstrate, and a minimum distance between an orthographic projection ofthe third via hole on the base substrate and an orthographic projectionof the first capacitor electrode on the base substrate ranges from 0.5μm to 6 μm.

In some examples, in the first direction, the first via hole and thethird via hole are on a same side of the first capacitor electrode, andare on an opposite side of the first capacitor electrode to the firsttransistor.

In some examples, a center of the first via hole and a center of thethird via hole are respectively on both sides of a center line of achannel region of the third transistor in the first direction.

In some examples, the first capacitor electrode, an active layer of thefirst transistor, an active layer of the second transistor, and theactive layer of the third transistor are all in a same layer; the firstcapacitor electrode and the active layer of the first transistor are inan integral structure; and the first capacitor electrode, the activelayer of the second transistor, and the active layer of the thirdtransistor are insulated from one another.

In some examples, the second capacitor electrode is located on a side ofan active layer of the first transistor close to the base substrate, anorthographic projection of the second capacitor electrode on the basesubstrate covers an orthographic projection of the active layer of thefirst transistor on the base substrate.

In some examples, the storage capacitor further comprises a thirdcapacitor electrode, and the third capacitor electrode, the firstelectrode of the first transistor and the second electrode of the thirdtransistor are in an integral structure.

In some examples, the third capacitor electrode is on a side of thefirst capacitor electrode away from the base substrate, the secondcapacitor electrode is on a side of the first capacitor electrode closeto the base substrate, and the first capacitor electrode is at leastpartially overlapped with both the second capacitor electrode and thethird capacitor electrode in the direction perpendicular to the basesubstrate respectively.

In some examples, in the first direction, the first transistor and thesecond transistor are both disposed on a same side of the firstcapacitor electrode as the first via hole and on an opposite side of thefirst capacitor electrode to the third transistor.

In some examples, channel length directions of the first transistor, thesecond transistor and the third transistor are parallel to one another,and are all parallel to the first direction.

In some examples, the active layer of the third transistor comprises achannel region, a first electrode contact region, and a second electrodecontact region, and the first electrode contact region is electricallyconnected to the first electrode of the third transistor through thefirst via hole; a center line, which is along the first direction, of achannel region of the third transistor along the first directioncoincides with a center line which is along the first direction, of thesub-pixel.

In some examples, the first transistor and the second transistor arerespectively on both sides of a center line, which is along the firstdirection, of the sub-pixel.

In some examples, the display substrate further comprises a plurality offirst scan lines and a plurality of second scan lines extended in thesecond direction. The plurality of first scan lines and the plurality ofsecond scan lines are electrically connected with the plurality of rowsof sub-pixels in a one-to-one correspondence respectively; each of theplurality of first scan lines is connected with the gate electrodes ofthe first transistors in one corresponding row of sub-pixels, and eachof the plurality of second scan lines is connected with the gateelectrodes of the third transistors in one corresponding row ofsub-pixels.

In some examples, the display substrate further comprises a plurality offirst detection lines extended in the second direction. Each of theplurality of first detection lines is electrically connected to thesecond electrode of the third transistor in at least one of theplurality of sub-pixels, and is configured to electrically connect thethird transistor to the detection circuit.

In some examples, the plurality of first detection lines and the secondcapacitor electrode are in a same layer and are insulated from oneanother.

In some examples, the display substrate further comprises a plurality ofdata lines extended in the first direction. The plurality of data linesare electrically connected with the plurality of columns of sub-pixelsin a one-to-one correspondence, and each of the plurality of data linesis electrically connected with the second electrodes of the secondtransistors in one corresponding column of sub-pixels to provide thedata signal.

In some examples, each of the plurality of data lines and the secondelectrodes of the second transistors connected with the each data lineare in an integral structure.

At least one embodiment of the present disclosure further provides adisplay device comprising the display substrate and the light emittingelement, and the first electrode of the third transistor is electricallyconnected to the light emitting element through the second via hole.

At least one embodiment of the present disclosure further provides amethod for manufacturing a display substrate, comprising forming aplurality of sub-pixels on a base substrate. The plurality of sub-pixelsare arranged into a sub-pixel array in a first direction and a seconddirection, the first direction intersecting with the second direction,at least one of the plurality of sub-pixels comprises a firsttransistor, a second transistor, a third transistor, and a storagecapacitor on the base substrate, a first electrode of the secondtransistor is electrically connected to the first capacitor electrode ofthe storage capacitor and a gate electrode of the first transistor, asecond electrode of the second transistor is configured to receive adata signal, a gate electrode of the second transistor is configured toreceive a first control signal, the second transistor is configured towrite the data signal to the gate electrode of the first transistor andthe storage capacitor in response to the first control signal, a firstelectrode of the first transistor is electrically connected to a secondcapacitor electrode of the storage capacitor and configured to beelectrically connected to a light emitting element, a second electrodeof the first transistor is configured to receive a first power voltage,the first transistor is configured to control a current for driving thelight emitting element under control of a voltage of the gate electrodeof the first transistor, a first electrode of the third transistor iselectrically connected with the first electrode of the first transistorand the second capacitor electrode of the storage capacitor, a secondelectrode of the third transistor is configured to be connected with adetection circuit, a gate electrode of the third transistor isconfigured to receive a second control signal, and the third transistoris configured to detect an electrical characteristic of the sub-pixel towhich the third transistor belongs by the detection circuit in responseto the second control signal; the first electrode of the thirdtransistor is electrically connected to an active layer of the thirdtransistor through a first via hole, and the first electrode of thethird transistor is configured to be electrically connected to the lightemitting element through a second via hole; the first via hole and thesecond via hole are at least partially overlapped with each other in adirection perpendicular to the base substrate.

BRIEF DESCRIPTION OF THE DRAWINGS

In order to clearly illustrate the technical solution of the embodimentsof the present disclosure, the drawings of the embodiments will bebriefly described. It is apparent that the described drawings are onlyrelated to some embodiments of the present disclosure and thus are notlimitative of the present disclosure.

FIG. 1A is a first schematic diagram of a display substrate according toat least one embodiment of the present disclosure;

FIG. 1B is a first diagram of a pixel circuit in the display substrateaccording to at least one embodiment of the present disclosure;

FIGS. 1C to 1E are signal timing diagrams of a driving method of a pixelcircuit according to embodiments of the present disclosure;

FIG. 2A is a second schematic diagram of a display substrate accordingto at least one embodiment of the present disclosure;

FIG. 2B is a sectional view of FIG. 2A along section line A-A′;

FIG. 3 is a third schematic diagram of a display substrate according toat least one embodiment of the present disclosure;

FIG. 4 is a fourth schematic diagram of a display substrate according toat least one embodiment of the present disclosure;

FIG. 5 is a fifth schematic diagram of a display substrate according toat least one embodiment of the present disclosure;

FIG. 6A is a schematic plan view of a first conductive layer in adisplay substrate according to at least one embodiment of the presentdisclosure;

FIG. 6B is a schematic plan view of a semiconductor layer in a displaysubstrate according to at least one embodiment of the presentdisclosure;

FIG. 6C is a schematic plan view of a second conductive layer in adisplay substrate according to at least one embodiment of the presentdisclosure;

FIG. 6D is a schematic plan view of a third conductive layer in adisplay substrate according to at least one embodiment of the presentdisclosure;

FIG. 7 is a sixth schematic diagram of a display substrate according toat least one embodiment of the present disclosure;

FIG. 8A is a partially enlarged view of FIG. 7;

FIG. 8B is a sectional view of FIG. 8A along section line B-B′;

FIG. 8C is a sectional view of a display substrate according to anotherembodiment of the present disclosure;

FIG. 9A is a sectional view of FIG. 7 along section line C-C′;

FIG. 9B is a second diagram of a pixel circuit in a display substrateaccording to at least one embodiment of the present disclosure;

FIG. 10 illustrates the influence of fluctuation of a storage capacitoron a display gray scale;

FIG. 11A is a seventh schematic diagram of a display substrate accordingto at least one embodiment of the present disclosure;

FIG. 11B is a sectional view of FIG. 11A along section line D-D′;

FIG. 11C illustrates misalignment of a first capacitor electrode;

FIG. 12 is a schematic diagram of a display panel according to at leastone embodiment of the present disclosure; and

FIG. 13 is a schematic diagram of a display device according to at leastone embodiment of the present disclosure.

DETAILED DESCRIPTION

In order to make objects, technical details and advantages ofembodiments of the present disclosure clear, the technical solutions ofthe embodiments will be described in a clearly and fully understandableway in connection with the related drawings. It is apparent that thedescribed embodiments are just a part but not all of the embodiments ofthe present disclosure. Based on the described embodiments herein, thoseskilled in the art can obtain, without any inventive work, otherembodiment(s) which should be within the scope of the presentdisclosure.

Unless otherwise defined, all the technical and scientific terms usedherein have the same meanings as commonly understood by one of ordinaryskill in the art to which the present disclosure belongs. The terms“first,” “second,” etc., which are used in the description and claims ofthe present disclosure, are not intended to indicate any sequence,amount or importance, but distinguish various components. The terms“comprises,” “comprising,” “includes,” “including,” etc., are intendedto specify that the elements or the objects stated before these termsencompass the elements or the objects listed after these terms as wellas equivalents thereof, but do not exclude other elements or objects.The phrases “connect”, “connected”, etc., are not intended to define aphysical connection or a mechanical connection, but may comprise anelectrical connection which is direct or indirect. The terms “on,”“under,” “right,” “left” and the like are only used to indicate relativeposition relationship, and in a case that the position of an object isdescribed as being changed, the relative position relationship may bechanged accordingly.

In the field of Organic Light Emitting Diode (OLED) display, with therapid development of high-resolution products, higher requirements areput forward on the structural design of a display substrate, such as thearrangement of pixels and signal lines. For example, compared with anOLED display device with a resolution of 4K, due to its doubledsub-pixel units, the OLED display device with a large size and aresolution of 8K has a doubled pixel density, a decreased line width ofa signal line, and an increased resistance-capacitance load and aself-resistance caused by parasitic resistance and parasitic capacitanceof the signal line. Correspondingly, signal delay (RC delay), voltagedrop (IR drop), voltage rise (IR rise), or the like caused by theparasitic resistance and the parasitic capacitance may become serious.These phenomena may seriously affect display quality of a displayproduct. For example, the resistance of a power line becomes larger, sothat the voltage drop on a high power voltage (VDD) line becomes larger,and the voltage rise on a low power voltage (VSS) line becomes larger,which may lead to different power voltages received by the sub-pixels atdifferent positions, thereby causing problems, such as color shift andnon-uniform display.

By connecting an auxiliary electrode line with the power line inparallel, the display substrate according to at least one embodiment ofthe present disclosure reduces the resistance of the power line, therebyeffectively relieving the voltage drop or voltage rise on the power lineand improving the display quality; meanwhile, by designing thearrangement of the auxiliary electrode line, the display substrate mayreduce the problems of color shift, non-uniform display, or the likecaused by the resistance-capacitance load between signal lines as muchas possible.

FIG. 1A is a block diagram of a display substrate according to at leastone embodiment of the present disclosure. As shown in FIG. 1A, thedisplay substrate 10 includes a plurality of sub-pixels 100 arranged inan array, for example, each sub-pixel 100 includes a light emittingelement and a pixel circuit for driving the light emitting element toemit light. For example, the display substrate is an organic lightemitting diode (OLED) display substrate and the light emitting elementis an OLED. The display substrate may further include a plurality ofscan lines, and a plurality of data lines for providing scan signals(control signals) and data signals for the plurality of sub-pixels todrive the plurality of sub-pixels. The display substrate may furtherinclude a power line, a detection line, or the like, as necessary.

The pixel circuit includes a drive sub-circuit for driving the lightemitting element to emit light and a detection sub-circuit for detectingan electrical characteristic of the sub-pixel to achieve externalcompensation. The specific structure of the pixel circuit is not limitedin the embodiments of the present disclosure.

FIG. 1B shows a schematic diagram of a 3T1C pixel circuit for thedisplay substrate. The pixel circuit may further include a compensationcircuit, a reset circuit, or the like as needed, which is not limited inthe embodiments of the present disclosure.

Referring to FIGS. 1B and 1C, the pixel circuit includes a firsttransistor T1, a second transistor T2, a third transistor T3, and astorage capacitor Cst. A first electrode of the second transistor T2 iselectrically connected to a first capacitor electrode of the storagecapacitor Cst and a gate electrode of the first transistor T1, a secondelectrode of the second transistor T2 is configured to receive a datasignal GT, and the second transistor T2 is configured to write the datasignal DT to the gate electrode of the first transistor T1 and thestorage capacitor Cst in response to a first control signal G1; a firstelectrode of the first transistor T1 is electrically connected to asecond capacitor electrode of the storage capacitor Cst and isconfigured to be electrically connected to a first electrode of thelight emitting element, a second electrode of the first transistor T1 isconfigured to receive a first power voltage V1 (e.g., a high powervoltage VDD), and the first transistor T1 is configured to control acurrent for driving the light emitting element under the control of avoltage of the gate electrode of the first transistor T1; a firstelectrode of the third transistor T3 is electrically connected to boththe first electrode of the first transistor T1 and the second capacitorelectrode of the storage capacitor Cst, a second electrode of the thirdtransistor T3 is configured to be connected to a first detection line130 so as to be connected to an external detection circuit 11, and thethird transistor T3 is configured to detect an electrical characteristicof the sub-pixel the third transistor T3 belongs to in response to thesecond control signal G2 to achieve external compensation; theelectrical characteristic includes, for example, a threshold voltageand/or carrier mobility of the first transistor T1, or a thresholdvoltage and a drive current of the light emitting element, or the like.The external detection circuit 11 is, for example, a conventionalcircuit including a digital-to-analog converter (DAC) and ananalog-to-digital converter (ADC), which are not repeated in detail inthe embodiment of the present disclosure.

The transistors used in the embodiments of the present disclosure may bethin film transistors, field effect transistors, or other switchingdevices with the same characteristics, and the thin film transistor istaken as an example in the embodiments of the present disclosure forillustration. The source and drain of the transistor used herein may besymmetrical in structure, so that there may be no difference instructure between the source and drain. In the embodiments of thepresent disclosure, in order to distinguish two electrodes of thetransistor except for a gate transistor, one of the electrodes isdirectly described as a first electrode, and the other electrode isdirectly described as a second electrode. Further, the transistor may beclassified into N-type and P-type transistor according to theircharacteristics. When the transistor is a P-type transistor, a turn-onvoltage is a low level voltage (e.g., 0V, −5V, −10V or other suitablevoltages), and a turn-off voltage is a high level voltage (e.g., 5V, 10Vor other suitable voltages); when the transistor is an N-typetransistor, the turn-on voltage is a high level voltage (e.g., 5V, 10V,or other suitable voltages) and the turn-off voltage is a low levelvoltage (e.g., 0V, −5V, −10V, or other suitable voltages). It should benoted that, in the following description, the transistor in FIG. 1B isan N-type transistor as an example, which should not be construed as alimitation to the present disclosure.

The operating principle of the pixel circuit shown in FIG. 1B will bedescribed with reference to the signal timing diagrams shown in FIGS. 1Cto 1E, wherein FIG. 1B shows the signal timing diagram of the pixelcircuit during display, and FIGS. 1C and 1D show the signal timingdiagram of the pixel circuit during detection.

For example, as shown in FIG. 1B, the display process of each frameimage includes a data writing and resetting phase 1 and a light emittingphase 2. FIG. 1B shows a timing waveform of each signal in each phase.One operation process of the 3T1C pixel circuit includes: in the datawriting and resetting phase 1, the first control signal G1 and thesecond control signal G2 are both turn-on signals, the second transistorT2 and the third transistor T3 are turned on, the data signal DT istransmitted to the gate electrode of the first transistor T1 through thesecond transistor T2, the first switch K1 is turned off, theanalog-to-digital converter writes a reset signal to the first electrodeof the light emitting element (e.g., an anode of the OLED) through thefirst detection line 130 and the third transistor T3, the firsttransistor T1 is turned on and generates a drive current to charge thefirst electrode of the light emitting element to an operating voltage;in the light emitting period 2, the first control signal G1 and thesecond control signal G2 are both turn-off signals, the voltage acrossthe storage capacitor Cst remains unchanged due to a bootstrap effect ofthe storage capacitor Cst, the first transistor T1 operates in asaturation state with an unchanged current, and drives the lightemitting element to emit light.

For example, FIG. 1C shows a signal timing diagram when the pixelcircuit detects a threshold voltage. One operation process of the 3T1Cpixel circuit includes: the first control signal G1 and the secondcontrol signal G2 are both turn-on signals, the second transistor T2 andthe third transistor T3 are turned on, and the data signal DT istransmitted to the gate electrode of the first transistor T1 through thesecond transistor T2; the first switch K1 is turned off, theanalog-to-digital converter writes a reset signal to the first electrode(node S) of the light emitting element through the first detection line130 and the third transistor T3, the first transistor T1 is turned on tocharge the node S until the first transistor is turned off, and thedigital-to-analog converter samples the voltage on the first detectionline 130 to obtain the threshold voltage of the first transistor T1.This process may be performed, for example, when the display device isturned off.

For example, FIG. 1C shows a signal timing diagram when the pixelcircuit detects the mobility. One operation process of the 3T1C pixelcircuit includes: in the first phase, the first control signal G1 andthe second control signal G2 are both turn-on signals, the secondtransistor T2 and the third transistor T3 are turned on, and the datasignal DT is transmitted to the gate electrode of the first transistorT1 through the second transistor T2; the first switch K1 is turned off,and the analog-to-digital converter writes a reset signal to the firstelectrode (node S) of the light emitting element through the firstdetection line 130 and the third transistor T3; in the second phase, thefirst control signal G1 is a turn-off signal, the second control signalG1 is a turn-on signal, the second transistor T2 is turned off, thethird transistor T3 is turned on, and the first switch K1 and the secondswitch K2 are turned off to float the first detection line 130; due tothe bootstrap effect of the storage capacitor Cst, the voltage acrossthe storage capacitor Cst remains unchanged, the first transistor T1operates in a saturation state with an unchanged current and drives thelight emitting element to emit light, and then the digital-to-analogconverter samples the voltage on the first detection line 130 andcalculates the carrier mobility in the first transistor T1 according toa magnitude of the light emitting current. For example, the process maybe performed in a blanking phase between display phases.

The electrical characteristics of the first transistor T1 may beobtained and a corresponding compensation algorithm may be implementedby the above-mentioned detection.

For example, as shown in FIG. 1A, the display substrate 10 may furtherinclude a data drive circuit 13 and a scan drive circuit 14. The datadrive circuit 13 is configured to send out data signals, such as theabove-mentioned data signal DT, as needed (for example, for inputting animage signal to the display device); the pixel circuit of each sub-pixelis further configured to receive the data signal and apply the datasignal to the gate electrode of the first transistor. The scan drivecircuit 14 is configured to output various scan signals, including, forexample, the above-mentioned first control signal G1 and second controlsignal G2, which are, for example, integrated circuit chips (ICs) orgate drive circuits directly prepared on the display substrate (GOAs).

For example, the display substrate 10 further includes a control circuit12. For example, the control circuit 12 is configured to control thedata drive circuit 13 to apply the data signal, and to control the gatedrive circuit to apply the scan signal. An example of the controlcircuit 12 is a timing control circuit (T-con). The control circuit 12may be in various forms, for example including a processor 121 and amemory 522, the memory 121 including an executable code which theprocessor 121 runs to perform the above-mentioned detection method.

For example, the processor 121 may be a Central Processing Unit (CPU) orother forms of processing devices having data processing capabilitiesand/or instruction execution capabilities, and may include, for example,a microprocessor, a programmable logic controller (PLC), or the like.

For example, the memory 522 may include one or more computer programproducts which may include various forms of computer-readable storagemedia, such as volatile memory and/or non-volatile memory. The volatilememory may include, for example, random access memory (RAM), and/orcache memory (cache), or the like. The non-volatile memory may include,for example, read only memory (ROM), hard disk, flash memory, etc. Oneor more computer program instructions may be stored on thecomputer-readable storage medium, and the processor 121 may execute thedesired functions of the program instructions. Various applications andvarious data, such as electrical characteristic parameters acquired inthe above-mentioned detection method, etc., may also be stored in thecomputer-readable storage medium.

FIG. 2A is a schematic diagram of sub-pixels of a display substrate 10according to at least one embodiment of the present disclosure, and asshown in FIG. 2A, the display substrate 10 includes a base substrate101, and a plurality of sub-pixels 100 located on the base substrate101. The plurality of sub-pixels 100 are arranged in a sub-pixel arrayin a first direction D1 and a second direction D2. For example, thecolumn direction of the sub-pixel array is the first direction D1 andthe row direction of the sub-pixel array is the second direction D2, thefirst direction D1 intersecting with, e.g., orthogonal to the seconddirection D2. Six adjacent sub-pixels in a row of sub-pixels areexemplarily shown in FIG. 2A, and the implementation of the presentdisclosure is not limited to this layout.

Each row of sub-pixels is divided into a plurality of sub-pixel groupsPG, each sub-pixel group including a first sub-pixel P1, a secondsub-pixel P2, and a third sub-pixel P3 which are sequentially arrangedin the second direction. FIG. 2A only schematically shows two adjacentsub-pixel groups PG in one row of sub-pixels. For example, the first,second, and third sub-pixels P1, P2, and P3 are configured to emit lightof three primary colors (RGB) respectively, so that each sub-pixel groupconstitutes one pixel unit. However, the number of sub-pixels includedin each sub-pixel group is not limited in the embodiments of the presentdisclosure.

The display substrate 10 further includes a plurality of data lines 110extended in the first direction D1, and the plurality of data lines 110are connected to each column of sub-pixels in the sub-pixel array inone-to-one correspondence to provide data signals for the sub-pixels.The plurality of data lines are divided into a plurality of data linegroups, corresponding to the plurality of sub-pixel groups PG inone-to-one correspondence.

As shown in FIG. 2A, each data line group includes a first data lineDL1, a second data line DL2, and a third data line DL3 connected to thefirst sub-pixel P1, the second sub-pixel P2, and the third sub-pixel P3respectively. For each sub-pixel group PG, the first data line DL1, thesecond data line DL2 and the third data line DL3 connectedcorrespondingly to the sub-pixel group PG are all located between thefirst sub-pixel P1 and the third sub-pixel P3 in the sub-pixel group PG.

As shown in FIG. 2A, the display substrate 10 further includes aplurality of auxiliary electrode lines 120 extended in the firstdirection D1, the plurality of auxiliary electrode lines 120 beingconfigured to be electrically connected with the second electrode of thelight emitting element to provide a second power voltage V2, which is,for example, a low power voltage VSS. Each of the plurality of auxiliaryelectrode lines 120 is spaced from any one of the plurality of datalines 110 by at least one column of sub-pixels 100; that is, theauxiliary electrode line 120 is not directly adjacent to any one of thedata lines 110. With such an arrangement, the signal delay on the dataline caused by the resistance-capacitance load due to being directlyadjacent to the auxiliary electrode line is avoided, and the problems ofcolor shift, non-uniform display, or the like caused by the delay arefurther avoided.

For example, as shown in FIG. 2A, for each row of sub-pixels, theauxiliary electrode line 120 is electrically connected to the secondelectrode (common electrode) of the light emitting element of eachsub-pixel in the row of sub-pixels through via holes, thereby forming aparallel structure with the second electrodes of the plurality of lightemitting elements, and reducing the resistance for applying the secondpower voltage.

FIG. 2B is a sectional view of FIG. 2A along section line A-A′. Withreference to FIGS. 2A and 2B, the display substrate 10 includes a firstinsulating layer 102, a second insulating layer 103, and a thirdinsulating layer 104 sequentially disposed on the base substrate 101,the auxiliary electrode line 120 is located on the third insulatinglayer 104, for example, and the display substrate 10 further includes afourth insulating layer 105 and a fifth insulating layer 106 disposed onthe auxiliary electrode line 120.

For example, the display substrate 10 further includes a connectionelectrode 121 on the fifth insulating layer 106, and the auxiliaryelectrode line 120 is electrically connected to the connection electrode121 through a via hole 301 in the fourth insulating layer 105 and a viahole 302 in the fifth insulating layer 106, and is connected to thesecond electrode 122 of the light emitting element through theconnection electrode 121. For example, the auxiliary electrode line 120is in the same layer and made of the same material as the data line inthe display substrate 10, and is insulated from the data line (as shownin FIG. 6D). For example, the connection electrode 121 is provided inthe same layer and made of the same material as the first electrode (notshown) of the light emitting element, and is insulated from the firstelectrode of the light emitting element.

The light emitting element is, for example, an organic light emittingdiode, and includes the first electrode, the second electrode 122, and alight emitting layer (not shown) between the first electrode and thesecond electrode 122. For example, the light emitting element has a topemission structure, the first electrode is reflective and the secondelectrode 122 is transmissive or semi-transmissive. For example, thefirst electrode is made of a high work function material to act as ananode, such as an ITO/Ag/ITO stacked structure; the second electrode 122is made of a low work function material to serve as a cathode, such assemi-transmissive metallic or metal alloy materials, such as an Ag/Mgalloy material.

For example, the auxiliary electrode line 120 is made of a metalmaterial, such as gold (Au), silver (Ag), copper (Cu), aluminum (Al),molybdenum (Mo), magnesium (Mg), tungsten (W), or an alloy material ofany combination thereof. For example, the auxiliary electrode line 120may also be made of a conductive metal oxide material, such as IndiumTin Oxide (ITO), Indium Zinc Oxide (IZO), zinc oxide (ZnO), AluminumZinc Oxide (AZO), or the like.

By connecting the auxiliary electrode line 120 with the second electrode122 in parallel, the resistance of the second electrode 122 may bereduced, thereby alleviating the problem of non-uniform display causedby the voltage rise or voltage drop on the second electrode 122.

In addition, the auxiliary electrode line 120 may be further in parallelconnection with other electrodes to reduce the resistance of theauxiliary electrode line 120, thereby further reducing the resistance ofthe second electrode 122. For example, referring to FIGS. 2A and 6C, theauxiliary electrode line 120 is connected in parallel with theconnection electrode 126 in the second conductive layer 502 through thevia hole 304, and the connection electrode 126 is in the same layer andmade of the same material as the scan line in the display substrate, andis insulated from the scan line.

For example, the display substrate 10 further includes a pixel defininglayer 107 on the first electrode of the light emitting element. As shownin FIGS. 2A and 2B, the connection electrode 121 is connected to thesecond electrode 122 of the light emitting element through a via hole303 in the pixel defining layer 107. For example, the connectionelectrode 121 is in the same layer as the first electrode of the lightemitting element but is insulated from the first electrode of the lightemitting element.

As shown in FIGS. 2A and 2B, by providing the connection electrode 121to electrically connect the second electrode 122 of the light emittingelement with the auxiliary electrode line 120, an overlarge segmentdifference resulting from the second electrode 122 being directlyconnected to the auxiliary electrode line 120 through a via hole may beavoided, and thus, a wire fracture easily caused by the huge segmentdifference may be avoided, and correspondingly, problems such as poorcontact caused by the wire fracture may be avoided. In addition, anorthographic projection of the via hole 302 in the fifth insulatinglayer 106 on the base substrate 101 covers an orthographic projection ofthe via hole 301 in the fourth insulating layer 105 on the basesubstrate 101, so that a step is formed between the via hole 302 and thevia hole 301, and the problem of poor contact caused by fracture of theconnection electrode 121 due to the overlarge segment difference may befurther avoided.

In addition, as shown in FIGS. 2A and 2B, an orthogonal projection ofthe via hole 303 in the pixel defining layer 107 on the base substrate101 covers an orthogonal projection of the via hole 302 in the fifthinsulating layer 106 on the base substrate 101, so that a step is formedbetween the via hole 303 and the via hole 302, and the second electrode122 may be prevented from being broken due to a huge segment differencein the via hole 303, thereby avoiding problems such as poor contactcaused by electrode breakage.

For example, the first insulating layer 102, the second insulating layer103, the third insulating layer 104, and the fourth insulating layer 105are inorganic insulating layers, for example, oxides of silicon,nitrides of silicon or oxynitride of silicon, such as silicon oxide,silicon nitride, silicon oxynitride, or an insulating material includinga metal oxynitride, such as aluminum oxide, titanium nitride, or thelike. For example, the fifth insulating layer 106 and the pixel defininglayer 107 are made of organic insulating materials respectively, such asPolyimide (PI), acrylate, epoxy, polymethyl methacrylate (PMMA), or thelike. For example, the fifth insulating layer 106 is a planarizationlayer.

For example, the light emitting element of the display substrate 10according to some embodiments of the present disclosure may employ a topemission structure. For example, the pixel defining layer 107 has anopening region corresponding to each sub-pixel, the opening regioncorresponding to a position where the light emitting layer material ofthe light emitting element is formed. In FIG. 2A, the opening region 600of the pixel defining layer 107 corresponding to each sub-pixel is shownby a thick-line rounded rectangle. For example, the opening region 600exposes the first electrode of the light emitting element, so that thelight emitting material may be formed on the first electrode. Forexample, the shapes and sizes of the plurality of opening regions 600corresponding to the plurality of sub-pixels are all the same, so thatthe printing efficiency in manufacturing the display substrate 10 may beimproved. Alternatively, the shapes and sizes of the plurality ofopening regions 600 corresponding to the plurality of sub-pixels may bechanged according to the light emission efficiency, the service life, orthe like of the light emitting materials emitting light of differentcolors, for example, a printing area (opening region) of the lightemitting material having a short light emission life may be set to belarge, thereby improving the stability of light emission. For example,the size of the opening region 600 of the green sub-pixel, the redsub-pixel, and the blue sub-pixel may be reduced successively.

For example, as shown in FIG. 2A, the display substrate 10 furtherincludes a plurality of first detection lines 130 extended in the firstdirection D1, the first detection lines 130 being configured to beconnected to a detection sub-circuit (e.g., the third transistor T3) inthe sub-pixel 100 and to connect the detection sub-circuit to anexternal detection circuit. For example, each first detection line 130is spaced from any one of the plurality of data lines 110 by at leastone column of the sub-pixels; that is, the first detection line 130 isnot directly adjacent to any data line 110. By such an arrangement, thesignal delay on the data line caused by the resistance-capacitance loadof the data line due to the direct adjacency of the data line and thefirst detection line is avoided, and the problems of non-uniform displayor the like caused by the delay are further avoided. In addition, sincethe signal transmitted on the data line 110 is usually a high frequencysignal, the first detection line 130 is provided not to be directlyadjacent to the data line 110, which may prevent sampling precision frombeing influenced by crosstalk of the high frequency signal on the firstdetection line 130 during the external compensation charging samplingprocess.

FIG. 3 shows another schematic diagram of a display substrate accordingto at least one embodiment of the present disclosure, FIG. 4 shows aschematic diagram of signal lines of the display substrate correspondingto FIG. 3, and FIG. 5 is a schematic diagram of a display substrateaccording to another embodiment of the present disclosure.

In FIG. 3, twelve adjacent sub-pixels 100 in a row of sub-pixels areexemplarily shown; in FIG. 4, for the sake of clarity, the specificstructure of the sub-pixels is omitted; FIG. 5 schematically shows thecase of a plurality of rows of sub-pixels. The arrangement of signallines in the display substrate according to an embodiment of the presentdisclosure will be exemplarily described with reference to FIGS. 2A and3 to 5, but the present disclosure is not limited thereto.

As shown in FIGS. 3 to 5, for each row of sub-pixels, in the seconddirection D2, the n-th sub-pixel group PG <n> and the (n+1)th sub-pixelgroup PG <n+1> constitute a first sub-pixel group unit PGU1, therebyproviding a first sub-pixel group unit array PGUA1 including a pluralityof first sub-pixel group units; the (n+1)th sub-pixel group PG <n+1> andthe (n+2)th sub-pixel group PG <n+2> constitute a second sub-pixel groupunit PGU2, thereby providing a second sub-pixel group unit array PGUA2including a plurality of second sub-pixel group units; here, n is an oddor even number greater than 0. The adjacent first and second sub-pixelgroup units PGU1 and PGU2 share one sub-pixel group PG (PG <n+1>). Thecolumn directions of the first sub-pixel group unit array PGUA1 and thesecond sub-pixel group unit array PGUA2 are both in the first directionD1.

For example, referring to FIGS. 2A and 3, the plurality of firstdetection lines 130 are correspondingly connected to the plurality ofcolumns of the first sub-pixel group unit PGU1 respectively, and thesecond electrodes of the third transistors T3 of the sub-pixels in thefirst sub-pixel group unit PGU1 located in the same column are allelectrically connected to the same corresponding first detection line130.

For example, each of the first detection lines 130 is located betweenthe n-th sub-pixel group PG <n> and the (n+1)th sub-pixel group PG <n+1>of the correspondingly connected first sub-pixel group unit PGU 1. Asshown in FIGS. 2A and 3, in each first sub-pixel group unit PGU1, athird sub-pixel P3 in the n-th sub-pixel group PG <n> is adjacent to afirst sub-pixel P1 in the (n+1)th sub-pixel group PG <n+1>, and thefirst detection line 130 correspondingly connected to the firstsub-pixel group unit PGU1 is located between the third sub-pixel P3 inthe n-th sub-pixel group PG <n> and the first sub-pixel P1 in the(n+1)th sub-pixel group PG <n+1>.

For example, as shown in FIG. 3, the plurality of auxiliary electrodelines 120 and the plurality of first detection lines 130 are disposed inone-to-one correspondence, and each auxiliary electrode line 120 isdirectly adjacent to its corresponding first detection line 130 withouta sub-pixel disposed therebetween.

For example, as shown in FIG. 2B, the first detection line 130 and theauxiliary electrode line 120 are disposed in the same layer and made ofa same material, and are insulated from each other.

For example, the first detection line 130 may be disposed in parallelconnection with other electrodes to reduce the resistance on the firstdetection line 130. For example, referring to FIGS. 2A and 6C, the firstdetection line 130 is connected in parallel to the connection electrode127 in the second conductive layer 502 through the via hole 305, and theconnection electrode 127 and the scan line in the display substrate aredisposed in the same layer and made of a same material, and areinsulated from each other.

For example, as shown in FIGS. 3 to 5, the display substrate 110 furtherincludes a plurality of detection line segments 131 extended in thesecond direction D2. Each row of sub-pixels is correspondingly providedwith a plurality of detection line segments 131 spaced apart from oneanother, the plurality of detection line segments 131 are connected tothe plurality of first sub-pixel group units PGU1 in the row ofsub-pixels in one-to-one correspondence respectively, and the secondelectrodes of the third transistors T3 in the sub-pixels in each firstsub-pixel group unit PGU1 are both electrically connected to acorresponding detection line segment 131. As shown in FIG. 5, theplurality of detection line segments 131 corresponding to the pluralityof rows of sub-pixels are arranged into a detection line array, and thecolumn direction of the detection line array is the first direction D1.The plurality of first detection lines 130 are respectively electricallyconnected to the plurality of columns of detection line segments 131 inthe detection line array in one-to-one correspondence, and the pluralityof detection line segments 131 located in the same column respectivelyintersect with one corresponding first detection line 130 and areelectrically connected with the corresponding first detection line 130through the via hole 201, so as to connect the first detection line tothe third transistor T3 in each corresponding sub-pixel 100. Referringto FIGS. 3 and 4, each of the detection line segments 131 iselectrically connected to the second electrode of the third transistorT3 of each sub-pixel in the corresponding first sub-pixel group unitPGU1 through the via hole 202.

For example, the display substrate 10 further includes a plurality offirst power lines 140 extended in the first direction D1, and theplurality of first power lines 140 are configured to provide a firstpower voltage V1 for the plurality of sub-pixels; the first powervoltage is exemplarily a high power voltage VDD. As shown in FIGS. 3 and4, any one of the first power lines 140 is not overlapped with thedetection line segment 131 in a direction perpendicular to the basesubstrate 101, i.e., the first power line 140 is disposed correspondingto an interval of adjacent detection line segments 131. This arrangementreduces the overlap of signal lines and thus effectively reduces theparasitic capacitance between the signal lines and the signal delaycaused thereby.

For example, as shown in FIGS. 3 and 4, each of the first power lines140 is spaced from any one of the plurality of data lines 110 by atleast one column of sub-pixels; that is, the first power line 140 is notdirectly adjacent to any one of the data lines 110. With such anarrangement, the signal delay on the data line caused by theresistance-capacitance load due to the directly adjacency of the dataline and the first power line is avoided, and the problems of colorshift, non-uniform display, or the like caused by the delay are furtheravoided.

For example, any one of the first power lines 140 is spaced from any oneof the auxiliary electrode lines 120 by at least one sub-pixel group PG.For example, as shown in FIGS. 3 and 4, the first power line 140 and theauxiliary electrode line 120 are alternately disposed between adjacentsub-pixel groups PG. This arrangement may improve wiring uniformity,thereby reducing wiring density and the risk of short circuits.

For example, as shown in FIGS. 3 and 4, the plurality of first powerlines 140 are correspondingly connected to the plurality of columns ofthe second sub-pixel group unit PGU2 respectively, and the secondelectrodes of the first transistors T1 of the sub-pixels in the secondsub-pixel group unit PGU2 in the same column are electrically connectedto one corresponding first power line 140.

For example, as shown in FIGS. 3 and 4, each of the first power lines140 is located between the (n+1)th sub-pixel group PG <n+1> and the(n+2)th sub-pixel group PG <n+2> in the correspondingly connected secondsub-pixel group unit PGU 2. In each second sub-pixel group unit PGU2,the third sub-pixel P3 in the (n+1)th sub-pixel group PG <n+1> isadjacent to the first sub-pixel P1 in the (n+2)th sub-pixel group PG<n+2>, and the first power line 140 correspondingly connected to thesecond sub-pixel group unit PGU2 is located between the third sub-pixelP3 in the (n+1)th sub-pixel group PG <n+1> and the first sub-pixel P1 inthe (n+2)th sub-pixel group PG <n+2>.

For example, the first power line 140 may be arranged in parallelconnection with other electrodes to reduce the resistance on the firstpower line 140. For example, referring to FIGS. 2A and 6C below, thefirst power line 140 is connected in parallel to the connectionelectrode 128 in the second conductive layer 502 through the via hole306, and the connection electrode 128 and the scan line in the displaysubstrate are disposed in the same layer and insulated from each other,and made of the same material.

For example, as shown in FIGS. 3 and 4, the display substrate 110further includes a plurality of power line segments 141 extended in thesecond direction D2. Each row of sub-pixels is correspondingly providedwith a plurality of power line segments 141 spaced apart from oneanother, the plurality of power line segments 141 connected to theplurality of second sub-pixel group units PGU2 in the row of sub-pixelsin one-to-one correspondence respectively, and the second electrode ofthe first transistor T1 in the sub-pixel in each second sub-pixel groupunit PGU2 is electrically connected to a corresponding detection linesegment 131. As shown in FIG. 4, the plurality of power line segments141 corresponding to the plurality of rows of sub-pixels are arrangedinto a power line array, and the column direction of the power linearray is the first direction D1. The plurality of first power lines 140are electrically connected to the plurality of columns of power linesegments 141 in the power line array in one-to-one correspondencerespectively, and the plurality of power line segments 141 located inthe same column intersect with the same one corresponding first powerline 140 respectively and are electrically connected through the viahole 203 with the corresponding first power line 140.

Referring to FIGS. 3 and 4, for each of the second sub-pixel group unitsPGU2, the first power line 140 is electrically connected to the secondelectrode of the first transistor T1 in the sub-pixels (the firstsub-pixel in the (n+1)th sub-pixel group PG <n+1> or the third sub-pixelP3 in the (n+2)th sub-pixel group PG <n+2>) adjacent to the first powerline 140 through the via hole 204; each power line segment 141 iselectrically connected to the second electrode of the first transistorT1 in the sub-pixels, which are not adjacent to the first power line140, through the via hole 205, thereby connecting the first power line140 to the second electrode of the first transistor T1 in thesub-pixels. As shown in FIG. 2A, the first power line 140 is directlyelectrically connected to the second electrode of the first transistorT1 in the sub-pixel through the via hole 204, so that the firsttransistor T1 is prevented from being extended to overlap the scan line,and the parasitic capacitance between the signal lines is reduced.

For example, as shown in FIG. 4, the first power line 140 is disposedclosely adjacent to the sub-pixel, that is, no other signal line ispresent between the first power line 140 and the sub-pixel, so that thefirst power line 140 may be electrically connected to the sub-pixels onthe left and right sides through the via hole 204.

Referring to FIGS. 4 and 5, the power line segment 141 is not overlappedwith either of the first detection line 130 and the auxiliary electrodeline 120 in the direction perpendicular to the base substrate 110; thatis, the first detection line 130 and the auxiliary electrode line 120are disposed corresponding to the interval of the adjacent power linesegments 141. This arrangement reduces the overlap of the signal linesand thus effectively reduces the parasitic capacitance between thesignal lines and the signal delay caused thereby.

For example, in a display substrate, a mesh electrode may be used toprovide a first power voltage, and the plurality of sub-pixels in thedisplay substrate are connected to the mesh electrode to receive thefirst power voltage, and a structure using the mesh electrode isreferred to as a mesh structure. When a defect (e.g., a short circuitdefect or a fracture defect) occurs at any position of the meshelectrode in the display substrate having the mesh structure, all thesub-pixels in the display substrate are affected.

As described above, with respect to the mesh structure, the first powerline 140 in the display substrate 10 according to the embodiment of thepresent disclosure adopts a non-mesh structure. Even when a failureoccurs in one of the first power lines 140, only the sub-pixelsconnected to the one first power line 140 are affected, withoutaffecting the sub-pixels connected to other first power lines 140, sothat redundancy and stability of the display substrate 10 may beimproved; and this configuration facilitates the detection of thedefect.

For example, before leaving the factory, the display substrate 10 may bedetected to determine whether the product requirements are met. Forexample, in the detection phase, whether the failure occurs may bedetermined by detecting parameters, such as voltages and currents on theplurality of first power lines 140, respectively. With respect to thedisplay panel using the mesh structure, the display substrate 10 usingthe non-mesh structure according to the embodiment of the presentdisclosure may position the first power line 140 where the defectoccurs, so that the defect may be eliminated.

Referring to FIGS. 3 and 4, for example, the display substrate 10further includes a plurality of first scan lines 150 and a plurality ofsecond scan lines 160 extended in the second direction D2, and each rowof sub-pixels is correspondingly connected to one of the first scanlines 150 and one of the second scan lines 160 respectively. Theplurality of first scan lines 150 are connected to the gate electrodesof the first transistors T1 in the plurality of rows of sub-pixelsrespectively to provide the first control signal G1, and the pluralityof second scan lines 160 are connected to the gate electrodes of thethird transistors T3 in the plurality of rows of sub-pixels respectivelyto provide the second control signal G2. For example, the first scanline 150 is integrated with the gate electrode of the second transistorT2 of one corresponding row of sub-pixels (the same electrode block),and the second scan line 160 is integrated with the gate electrode ofthe third transistor T3 of one corresponding row of sub-pixels (the sameelectrode block).

It should be noted that the first scan line and the second scan line areomitted in FIG. 5 for clarity.

For example, as shown in FIGS. 3 and 4, for each row of sub-pixels, inthe first direction D1, the corresponding first scan line 150 and secondscan line 160 are respectively located on two sides of the firsttransistor T1 in the row of sub-pixels.

For example, as shown in FIG. 4, each of the first scan lines 150includes a first portion 151 and a second portion 152 connectedalternately, the second portion 152 has a ring structure, and the secondportion 152 has a larger size than the first portion 151 in the firstdirection D1. Each of the second portions 152 intersects with at leastone of the data line 110, the auxiliary electrode line 120, the firstdetection line 130, and the first power supply line 140 in the directionperpendicular to the base substrate 101.

Similarly, each of the second scan lines 160 includes a first portion161 and a second portion 162 connected alternately, the second portion162 has a ring structure, and the size of the second portion 162 islarger than that of the first portion 161 in the first direction D1.Each of the second portions 162 intersects with at least one of the dataline 110, the auxiliary electrode line 120, the first detection line130, and the first power supply line 140 in the direction perpendicularto the base substrate 101.

By arranging the portions where the scan line intersects with the dataline 110, the auxiliary electrode line 120, the first detection line130, and the first power line 140 into a ring structure, i.e., adual-channel structure, the yield of the device may be effectivelyimproved. For example, the position where the signal lines intersect iseasy to cause a short-circuit failure due to electrostatic breakdown ofthe parasitic capacitance. During detection, when it is detected that ashort-circuit failure occurs in one channel of the ring structure, thechannel may be cut off (for example, by laser cutting), and the circuitstructure may still normally work through the other channel.

Since the width of the second portion is greater than the width of thefirst portion, the first portion is sandwiched between adjacent secondportions to form a concave structure. In the layout design, structuressuch as via holes may be designed corresponding to the concavestructures, so that the pixel density is improved.

For example, as shown in FIG. 3, a channel region of the thirdtransistor T3 is overlapped with the first portion 161 of the secondscan line 160 in the direction perpendicular to the base substrate 101,and is not overlapped with the second portion 162 of the second scanline 160 in the direction perpendicular to the base substrate. Forexample, as shown in FIG. 4, the second electrode of the thirdtransistor T3 is electrically connected to an active layer of the thirdtransistor T3 through the via hole 206, and the via hole 206 correspondsto the concave structure, thereby saving layout space.

For example, adjacent signal lines correspond to the same second portionof the scan line, thereby reducing the second portion. For example, asshown in FIG. 4, the auxiliary electrode line 120 is adjacent to thefirst detection line 130, so that they may correspond to the same secondportion of the scan line, thereby saving the layout space.

For example, the first portion 151 of the first scan line 150 isintegrated with the gate electrode of the second transistor T2 of onecorresponding row of sub-pixels (the same electrode block), and thefirst portion 161 of the second scan line 160 is integrated with thegate electrode of the third transistor T3 of one corresponding row ofsub-pixels (the same electrode block).

By connecting the auxiliary electrode line in parallel with the secondelectrode of the light emitting element, the display substrate accordingto some embodiments of the present disclosure reduces the voltage drop(or voltage rise) on the second electrode, thereby improving the displayquality of the display substrate. The display substrate according tosome other embodiments of the present disclosure improves the displayquality of the display substrate by reducing the voltage drop (orvoltage rise) on the first electrode of the light emitting element.

As shown in FIG. 1B, the first electrode of the light emitting elementis electrically connected to the first electrode of the first transistorT1, the first electrode of the third transistor T3, and the secondcapacitor electrode of the storage capacitor Cst and is connected to anode S. In this situation, if the resistances of the first electrode ofthe light emitting element, the first electrode of the first transistorT1, the first electrode of the third transistor T3, and the secondcapacitor electrode of the storage capacitor Cst are large, and a largevoltage drop is caused, the potential at the node S will be lost,thereby affecting the gray scale value to be actually displayed by thecorresponding sub-pixel, and causing color shift, non-uniform display,or the like.

Some embodiments of the present disclosure provide a display substratewhich reduces a distance between via holes, shortens a charge move path,decreases the voltage drop on the wire, and improves the display effectof the display substrate by arranging the via hole connecting the firstelectrode of the third transistor T3 and the light emitting element inthe sub-pixel to be at least overlapped with the via hole connecting thefirst electrode of the third transistor T3 with the active layer of thethird transistor in the direction perpendicular to the base substrate.

A specific structure of the sub-pixel in the display substrate 10 shownin FIG. 2A will be described below. For convenience of explanation, inthe following description, the gate electrode, the first electrode, thesecond electrode, and the active layer of the first transistor T1 arerespectively denoted by T1 g, T1 s, T1 d, and T1 a; the gate electrode,the first electrode, the second electrode, and the active layer of thesecond transistor T2 are respectively denoted by T2 g, T2 s, T2 d, andT2 a; the gate electrode, the first electrode, the second electrode, andthe active layer of the third transistor T3 are respectively denoted byT3 g, T3 s, T3 d, and T3 a; and the first capacitor electrode, thesecond capacitor electrode, and the third capacitor electrode of thestorage capacitor Cst are respectively denoted by Ca, Cb, and Cc.

It should be noted that “disposed in the same layer” in the presentdisclosure refers to a structure formed by two (or more) structuresbeing formed by the same deposition process and patterned by the samepatterning process, and the materials thereof may be the same ordifferent. The “integral structure” in the present disclosure means astructure in which two (or more) structures are connected to each otherby being formed through the same deposition process and patternedthrough the same patterning process, and their materials may be the sameor different.

Corresponding to FIG. 2A, FIGS. 6A to 6D show the patterns of the firstconductive layer 501, the semiconductor layer 504, the second conductivelayer 502 and the third conductive layer 503 in the sub-pixels of thedisplay substrate 10 respectively, and it should be noted that only thecorresponding structures of the adjacent six sub-pixels in one row ofsub-pixels are shown exemplarily, but this should not be taken as alimitation to the present disclosure. The first conductive layer 501,the first insulating layer 102, the semiconductor layer 504, the secondinsulating layer 103, the second conductive layer 502, the thirdinsulating layer 104, and the third conductive layer 503 are arranged onthe base substrate 101 successively, thereby forming the structure shownin FIG. 2A.

Referring to FIGS. 2A and 6A, for example, the first conductive layer501 includes a detection line segment 131, a power line segment 141, anda second capacitor electrode Cb of the storage capacitor Cst, which areinsulated from one another.

Referring to FIGS. 2A and 6B, for example, the semiconductor layer 504includes an active layer T1 a of the first transistor T1, an activelayer T2 a of the second transistor T2, and an active layer T3 a of thethird transistor T3, which are spaced apart from one another.

Referring to FIGS. 2A and 6C, for example, the second conductive layer502 includes the first scan line 150 and the second scan line 160insulated from each other, and further includes the gate electrode T1 gof the first transistor T1, the gate electrode T2 g of the secondtransistor T2, and the gate electrode T3 g of the third transistor T3insulated from one another. For example, the first scan line 150 isintegrated with the gate electrodes T2 g of the second transistors T2 ofone corresponding row of sub-pixels, and the second scan line 160 isintegrated with the gate electrodes T3 g of the third transistors T3 ofone corresponding row of sub-pixels respectively.

Referring to FIGS. 2A and 6D, for example, the third conductive layer503 includes the data line 110 (DL1, DL2, DL3), the auxiliary electrodeline 120, the first detection line 130, and the first power line 140,which are insulated from one another, and further includes first andsecond electrodes T1 s and T1 d of the first transistor T1, first andsecond electrodes T2 s and T2 d of the second transistor T2, and firstand second electrodes T3 s and T3 d of the third transistor T3. Forexample, the first power line 140 is integrated with the secondelectrode T1 d of the first transistor T1 in the (nearest) sub-pixelsdirectly adjacent to the first power line 140. For example, each dataline 110 is integrated with the second electrodes T2 d of the secondtransistors T2 in the sub-pixel connected to the data line.

For example, the material of the semiconductor layer 504 includes, butnot limited to, silicon-based materials (amorphous silicon a-Si,polysilicon p-Si, or the like), metal oxide semiconductors (IGZO, ZnO,AZO, IZTO, or the like), and organic materials (hexathiophene,polythiophene, or the like).

For example, the material of the first conductive layer 501, the secondconductive layer 502, and the third conductive layer 503 may includegold (Au), silver (Ag), copper (Cu), aluminum (Al), molybdenum (Mo),magnesium (Mg), tungsten (W), or an alloy material of any combinationthereof; or a conductive metal oxide material, such as indium tin oxide(ITO), indium zinc oxide (IZO), zinc oxide (ZnO), zinc aluminum oxide(AZO), etc.

For example, the semiconductor layer 504 further includes the firstcapacitor electrode Ca of the storage capacitor Cst, and the firstcapacitor electrode Ca is obtained by making the semiconductor layer 504conductive; that is, the first capacitor electrode Ca is disposed in thesame layer as the active layer T1 a of the first transistor T1, theactive layer T2 a of the second transistor, and the active layer T3 a ofthe third transistor.

For example, referring to FIGS. 2A and 6B, the first capacitor electrodeCa is connected with the active layer T2 a of the second transistor T2,and the first capacitor electrode Ca is spaced apart and insulated fromboth the active layer T1 a of the first transistor and the active layerT3 a of the third transistor. As shown in FIG. 6B, the first capacitorelectrode Ca and the active layer T2 a of the second transistor areconnected to each other to form a complete pattern portion.

For example, the display substrate 10 adopts a self-alignment process,and the semiconductor layer 504 is conducted (e.g., doped) by using thesecond conductive layer 502 as a mask, so that the portion of thesemiconductor layer 504 not covered by the second conductive layer 502is conducted, so that the first capacitor electrode Ca is obtained, andthe portions of the active layer of each transistor on both sides of thechannel region are conducted to form a first electrode contact regionand a second electrode contact region respectively, which are configuredto be respectively electrically connected to the first electrode and thesecond electrode of the transistor. FIG. 6B shows the first and secondelectrode contact regions T1 a 1 and T1 a 2 of the active layer T1 a ofthe first transistor T1, the first and second electrode contact regionsT2 a 1 and T2 a 2 of the active layer T2 a of the second transistor T2,and the first and second electrode contact regions T3 a 1 and T3 a 2 ofthe active layer T3 a of the third transistor T3.

For example, the display substrate 10 further includes a shielding layer170 located on a side of the sub-pixel 100 close to the base substrate,and an orthogonal projection of the shielding layer 170 on the basesubstrate 101 covers an orthogonal projection of the active layer T1 aof the first transistor T1 on the base substrate 101.

Because the first transistor T1 is a drive transistor of the pixelcircuit, stabilization of the electrical characteristics of the firsttransistor T1 is very important for the light emission characteristicsof the light-emitting element. The shielding layer 170 is an opaquelayer, which may avoid a shift of the threshold voltage of the firsttransistor T1 caused by light being incident on the active layer of thefirst transistor T1 from a backside of the base substrate 101, therebypreventing the light emitting characteristics of the corresponding lightemitting element connected with the first transistor T1 from beingaffected.

For example, the shielding layer 170 is an opaque conductive material,such as a metal or metal alloy material. This arrangement may alleviatethe back channel phenomenon of the base substrate 101 caused by trappedcharges.

For example, the shielding layer 170 and the second capacitor electrodeCb of the storage capacitor Cst are disposed in the same layer and madeof the same material. For example, the shielding layer 170 and thesecond capacitor electrode Cb of the storage capacitor Cst are the sameelectrode block. In this case, the shielding layer 170 is connected tothe first electrode T3 s of the third transistor T3, so as to preventthe threshold voltage of the transistor from being affected by apotential change in a floating shielding layer during the displayoperation.

For the sake of clarity, FIG. 7 shows a schematic diagram of onesub-pixel, FIG. 8A is a schematic enlarged diagram of region F in FIG.7, and FIG. 8B is a sectional view of FIG. 8A along section line B-B′.

Referring to FIGS. 7, 8A and 8B, the first electrode T3 s of the thirdtransistor T3 is electrically connected to the active layer T3 a of thethird transistor T3 through a via hole 401 (an example of a first viahole of the embodiment of the present disclosure), and is configured tobe electrically connected to the first electrode 123 of the lightemitting element 125 through a via hole 402 (an example of a second viahole of the embodiment of the present disclosure). The via hole 401 atleast partially overlaps the via hole 402 in the direction perpendicularto the base substrate 101.

For example, as shown in FIG. 8B, the second insulating layer 103 doesnot overlap with the semiconductor layer 504 in the directionperpendicular to the base substrate 101, so as to facilitate aconducting process on the semiconductor layer 504; for example, when aregion of the semiconductor layer 504 which is not covered with thesecond conductive layer 502 is conducted by ion implantation, theimplanted ions may not be blocked by the second insulating layer 103.For example, the second insulating layer 103 is disposed onlycorresponding to the second conductive layer 502; that is, the secondinsulating layer 103 and the second conductive layer 502 coincide in thedirection perpendicular to the base substrate 101.

For example, as shown in FIGS. 8A and 8B, the first electrode T3 s ofthe third transistor T3 is electrically connected to the secondcapacitor electrode Cb of the storage capacitor Cst via a via hole 403(an example of a third via hole of the embodiment of the presentdisclosure), and the via hole 403 is closely adjacent to the via hole401 at intervals; that is, no other circuit structures (such as anothervia hole or a wire) are present between the via hole 401 and the viahole 403. For example, the distance between the via holes 403 and 401 isas small as possible, for example, the minimum distance between the viaholes 403 and 401 is the minimum size that satisfies the Design Rule inthe manufacturing process of the display substrate 10, so as to ensurethe yield of the via hole. The design rule relate to the processcapability of the device, the fabrication process, the depth of the viahole, and the thickness of the material layer.

For example, as shown in FIG. 8B, in order to avoid an adverse effect ofa manufacturing process of the via hole 403 on the first electrodecontact region T3 a 1 of the adjacent third transistor T3, and theminimum distance L1 between the orthographic projection of the via hole403 and the orthographic projection of the first electrode contactregion T3 a 1 on the base substrate 101 is required to meet the designrule between a via hole and a wire in the manufacturing process of thedisplay substrate 10; for example, the minimum distance L1 is in a rangeof 0.5 μm to 6 μm, for example, 1 μm to 2 μm or 3 μm to 4 μm, and forexample, 3.5 μm.

By disposing the via holes 403 and 401 adjacently, the distacne betweenthe via holes is reduced, which may further shorten the charge move pathand decrease the voltage drop on the first electrode T3 s of the thirdtransistor T3, thereby avoiding the loss of the potential at the node Sand improving the display effect of the display substrate.

In some other examples, as shown in FIG. 8C, the first electrode T3 s ofthe third transistor T3 may also be electrically connected to the secondcapacitor electrode Cb through the first via hole 401. The arrangementmay reduce the occupied layout space and improve an integration level ofthe display substrate, without considering the design rule between viaholes.

Further, as shown in FIG. 8B, the first electrode via hole 401 of thethird transistor T3 is close to an edge of the sub-pixel region, and thefirst electrode via hole 402 of the light emitting element is disposedto overlap the first electrode via hole 401, so that the via hole 402may easily avoid a printing region of the light emitting layer 124 ofthe light emitting element 125 (i.e., the opening region of thesub-pixel). Referring to FIGS. 2B and 7, the opening region 600 of thepixel defining layer 107 does not cover the via holes 401 and 402; thatis, the light emitting layer 124 of the light emitting element 125 isnot overlapped with the via holes 401 and 402 in the directionperpendicular to the base substrate 101. This may avoid the influence onthe light emitting efficiency of the light emitting layer 124 caused bythe unevenness of the interface at the via hole 402.

As shown in FIG. 7, the first electrode of the first transistor T1 iselectrically connected to the second capacitor electrode Cb through thevia hole 404, the via hole 404 is closer to the center of the sub-pixelthan the first electrode via hole 401 of the third transistor; forexample, referring to FIG. 2A, the opening region 600 of the pixeldefining layer 107 covers the via hole 404; that is, the light emittinglayer 124 of the light emitting element 125 is overlapped with the viahole 404 in the direction perpendicular to the base substrate 101.

For example, referring to FIGS. 7, 8A and 8B, the via hole 403electrically connected between the first electrode T3 s of the thirdtransistor T3 and the second capacitor electrode Cb of the storagecapacitor Cst is not overlapped with the first capacitor electrode Ca inthe direction perpendicular to the base substrate 101, and the distancebetween the via hole 403 and the first capacitor electrode Ca is assmall as possible, so that the first capacitor electrode Ca has a largearea to be overlapped with the second capacitor electrode Cb to agreater degree, whereby a capacitance of the storage capacitor Cst maybe increased. For example, the minimum distance L2 between the via hole403 and the first capacitor electrode Ca is the minimum size thatsatisfies the Design Rule between the via hole and the routing line inthe manufacturing process of the display substrate 10, so as to ensurethe yield of the via hole and the routing line. The design rule relateto the process capability of the device, the process of fabricating thevia hole, the depth of the via hole, the thickness of the semiconductorlayer 504, or the like. For example, the minimum distance L2 between theorthographic projections of the via holes 403 and 401 on the basesubstrate 101 is in the range of 0.5 μm to 6 μm; for example, 1 μm to 6μm or 3 μm to 4 μm; for example, 3. μm.

For example, as shown in FIG. 7, the channel length directions of thefirst transistor T1, the second transistor T2, and the third transistorT3 are parallel to one another, for example, parallel to the firstdirection D1.

For example, as shown in FIG. 7, the first electrode contact region T3 a1 of the third transistor T3 is electrically connected to the firstelectrode of the third transistor T3 through the via hole 401, and acenter line of the channel region T3 a 0 of the third transistor T3 inthe first direction D1 is substantially located in a center line CL1 ofthe sub-pixel 100 in the first direction D1; for example, the centerline of the channel region T3 a 0 of the third transistor T3 in thefirst direction D1 coincides with the center line CL1 of the sub-pixel100 in the first direction D1.

It should be noted that the described center line CL1 of the sub-pixelin the first direction D1 refers to the center line in the firstdirection D1 of the sub-pixel region where the sub-pixel is located andwhich is defined by two signal lines extended in the first direction.

As described above, since the via hole 206, through which the secondelectrode of the third transistor T3 is connected to the secondelectrode contact region of the third transistor T3, corresponds to theconcave structure of the second scan line 160, symmetrically disposingthe channel region T3 a 0 of the third transistor T3 along the centerline CL1 of the sub-pixel may improve the wiring uniformity, improvespace utilization, and thus improve the pixel density.

For example, as shown in FIG. 7, the centers of the via holes 401 and403 are located on both sides of the center line of the channel regionT3 a 0 of the third transistor T3 in the first direction D1respectively.

For example, referring to FIGS. 6B and 7, the first transistor T1 andthe second transistor T2 are located on both sides of the center lineCL1 of the sub-pixel in the first direction D1 respectively. The firstelectrode T1 s of the first transistor T1 is electrically connected tothe active layer T1 a of the first transistor T1 through the via hole404, and is electrically connected to the first capacitor electrode Ca,the first electrode T3 s of the third transistor T3, and the firstelectrode of the light emitting element.

For example, the storage capacitor Cst further includes a thirdcapacitor electrode Cc, the third capacitor electrode Cc is electricallyconnected to the second capacitor electrode Cb, and the third capacitorelectrode Cc and the second capacitor electrode Cb are both at leastpartially overlapped with the first capacitor electrode Ca in thedirection perpendicular to the base substrate 101 to form a parallelcapacitor structure, so as to increase the capacitance of the storagecapacitor Cst. For example, the third capacitor electrode Cc, the secondcapacitor electrode Cb, and the first capacitor electrode Ca are alloverlapped in the direction perpendicular to the base substrate 101.

For example, the third capacitor electrode Cc and the second capacitorelectrode Cb are located on both sides of the first capacitor electrodeCa in the direction perpendicular to the base substrate 101respectively. For example, the third capacitor electrode Cc is locatedon the side of the first capacitor electrode Ca away from the basesubstrate 101, and the second capacitor electrode Cb is located on theside of the first capacitor electrode Ca close to the base substrate101.

For example, the third capacitor electrode Cc is located in the thirdconductive layer 503. For example, as shown in FIG. 6D, the firstelectrode T1 s of the first transistor T1, the first electrode T3 s ofthe third transistor T3, and the third capacitor electrode Cc are thesame electrode block; that is, the third capacitor electrode Cc and thesecond capacitor electrode Cb are electrically connected through the viahole 403.

For example, as shown in FIG. 7, in the first direction D1, the via hole401 and the via hole 403 are located on the same side (upper side in thedrawing) of the first capacitor electrode Ca, and are located on anopposite side of the first capacitor electrode Ca to both the via hole401 and the third transistor T3.

For example, as shown in FIG. 7, in the first direction D1, the firsttransistor T1 and the second transistor T2 are both disposed on the sameside of the first capacitor electrode Ca, and are located on an oppositeside of the first capacitor electrode Ca to the third transistor T3 andthe via hole 401.

In some other embodiments of the present disclosure, as shown in FIG. 7,the display substrate 10 further includes an extension portion 180protruding from the gate electrode T1 g of the first transistor T1, andthe extension portion 180 is formed by extended the gate electrode T1 gin the second direction D2. For example, the extension portion 180 andthe gate electrode T1 g of the first transistor T1 are in one electrodepattern. The extension portion 180 is at least partially overlapped withthe first electrode T2 s of the second transistor T2 in the directionperpendicular to the base substrate 101 and is electrically connected tothe first electrode T2 s of the second transistor T2. In the firstdirection D1, the gate electrode T1 g of the first transistor T1 has afirst side R1 (upper edge) closest to the third capacitor electrode Cc,the extension portion 180 has a second side R2 (upper edge) closest tothe third capacitor electrode Cc, and the second side R2 is recessedwith respect to the first side R1 in a direction away from the thirdcapacitor electrode Cc (downward in the drawing); that is, in the firstdirection D1, the first side R1 is closer to the third transistor T3than the second side R2.

In the first direction D1, the third capacitor electrode Cc has a thirdside R3 (lower edge) closest to the first electrode T2 s of the secondtransistor T2, the first electrode T2 s of the second transistor T2 hasa fourth side R4 (upper edge) closest to the third capacitor electrodeCc, and the third side R3 and the fourth side R4 are opposite to eachother with a gap therebetween. The second side R2 of the extensionportion 180 is recessed corresponding to the gap.

Referring to FIGS. 7 and 6D, the first electrode T2 s of the secondtransistor T2 extends to crosses the extension portion 180 in the firstdirection D1 so as to be electrically connected to the first capacitorelectrode Ca, and meanwhile the first electrode T2 s of the secondtransistor T2 is required to be insulated from the third capacitorelectrode Cc at an interval, and therefore, providing the second side R2of the extension portion 180 to be recessed downwards, that is, movingthe second side R2 downwards (toward the channel region of the secondtransistor T2) in the first direction D1, helps to facilitate thedownward moving of the third side R3 (lower edge) of the third capacitorelectrode Cc, so that the area of the third capacitor electrode Cc isincreased, which contributes to an increase in the capacitance of thestorage capacitor Cst.

For example, as shown in FIG. 6C, in the first direction D1, the size(width) of the extension portion 180 is less than the size (width) ofthe gate T1 g of the first transistor T1.

For example, the gap between the third side R3 and the fourth side R4exposes the first capacitor electrode Ca; for example, the size L3 ofthe gap in the first direction D1 is as small as possible, for example,to satisfy the minimum size of the Design Rule between the routing linesin the manufacturing process of the display substrate 10, so as toensure the yield. The design rule relates to the process capability ofthe device, the etching process of the third conductive layer 503, thethickness of the third conductive layer 503, or the like. For example,the range of the minimum value of the size L3 is 0.5 μm to 6 μm; forexample, 1 μm to 2 μm or 3 μm to 4 μm; for example, 3.5 μm. Thisarrangement may maximize the area of the third capacitor electrode Cc,thereby contributing to an increase in the capacitance of the storagecapacitor Cst.

Referring to FIGS. 6B, 8A and 8B, the active layer T3 a of the thirdtransistor T3 includes a body region 700 and a first via hole region 701which are arranged in the first direction D1 successively andelectrically connected to each other. The body region 700 includes achannel region T3 a 0 of the third transistor T3 and a second electrodecontact region T3 a 2 on a side of the channel region T3 a 0 away fromthe first via hole region 701, and the channel length direction of thechannel region is the first direction D1. The first electrode T3 s ofthe third transistor T3 is electrically connected to the first via holeregion 701 through the via hole 401.

As shown in FIG. 8A, the first via hole region 701 is shifted in thesecond direction D2 with respect to the body region 700, so that theactive layer T3 a of the third transistor T3 includes a first activelayer side 710 connecting the body region 700 and the first via holeregion 701, the extension direction of the first active layer side 710intersecting with both the first direction D1 and the second directionD2. A center line of the body region 700 in the first direction D1 isnot coincident with a center line CL4 of the first via hole region 701in the first direction D1. For example, the first via hole region 701 isa part or all of the first electrode contact region T3 a 1 of the thirdtransistor T3. For example, the first via hole region 701 is a region ofthe first electrode contact region T3 a 1 contacting the first electrodeT3 s of the third transistor T3.

For example, the center line of the body region 700 in the firstdirection D1 coincides with the center line CL1 of the sub-pixel in thefirst direction D1, so that the body region is disposed corresponding tothe concave structure of the second scan line 460, which helps toimprove the space utilization within the sub-pixel.

As shown in FIG. 8A, the first electrode T3 s of the third transistor T3is electrically connected to the second capacitor electrode Cb throughthe via hole 403. The center line CL3 of the first via hole region 701in the first direction D1 is located on a side of the center line CL1 ofthe sub-pixel in the first direction D1 away from the via hole 403. Forexample, the via holes 403 and 401 are on two sides of the center lineCL1 respectively. For example, the via holes 403 and 401 aresymmetrically disposed with respect to the center line CL1.

Since the via hole 401 and the via hole 403 are arranged side by side inthe second direction D2, the arrangement of the via hole 401 and the viahole 403 on both sides of the center line CL1 of the sub-pixel in thefirst direction D1 contributes to improving the space utilization andthus the pixel density. Therefore, the first electrode contact region T3a 1 of the third transistor T3 and the second electrode contact regionT3 a 2 may not be symmetrically disposed with respect to the channelregion T3 a 0, but are shifted in the second direction D2 to form thefirst via hole region 701.

As shown in FIG. 8A, the offset causes a steep slope of the active layerT3 a of the third transistor T3 at the junction of the first via holeregion 701 and the body region 700, causing a width of the channelthrough which current flows to narrow down, thereby forming a regionwhere a sudden change (increase) may occur to the resistance. Forexample, the body region 700 and the first via hole region 701 are bothrectangular, and a corner θ1 where the first via hole region 701 isconnected with the body region 700 is approximately 90 degrees.Referring to FIG. 1B, for example, in the reset phase of the pixelcircuit operation, the first switch K1 is turned off, theanalog-to-digital converter writes a reset signal to the first electrodeof the light emitting element (e.g., the anode of the OLED) through thefirst detection line and the third transistor T3, and in this situation,the current flows from the first electrode of the light emitting elementto the first via hole region 701 of the active layer of the thirdtransistor T3, and then flows from the first via hole region 701 to thebody region 700 and then flows into the detection line segment 131 toreach the external detection circuit. The moving direction of thecharges (electrons in this embodiment) are shown in FIG. 8A, and thechannel width is narrowed when the charge passes through the corner ofthe active layer, which affects the reset voltage at the node S and thusthe final display gray scale. For another example, in the detectionphase of the pixel circuit operation, the current also flows from theanode of the light emitting element to the detection line segment 131,and the sudden resistance change affects the accuracy of the detectedelectrical characteristics of the sub-pixel, thereby affecting theaccuracy of the compensation signal, and finally also affects theprecision of the light emitting current of the light emitting element,thereby affecting the precision of the display screen. For example, thefirst electrode contact region T3 a 1 of the third transistor T3 is madeof a conductive material obtained by conducting a semiconductormaterial, and the resistance is relatively large; for example, in thecase where the active layer is made of metal oxide semiconductor (e.g.,IGZO), a square resistance after the metal oxide semiconductor isconducted reaches an order of kilo-ohm, which causes more seriousinfluence of the sudden resistance change at the connection cornerbetween the body region 700 and the first via hole region 701 on thecurrent.

In the display substrate according to at least one embodiment of thepresent disclosure, the active layer T3 a of the third transistor T3further includes a first active layer side 710 connecting the bodyregion 700 and the first via hole region 701, the first active layerside 710 may be a straight line or a curved line (e.g., a protrudingcircular arc), and the extension direction of the first active layerside 710 intersects with both the first direction D1 and the seconddirection D2, i.e., neither parallel with nor perpendicular to thechannel length (L) direction of the third transistor T3. In the exampleshown in FIG. 8A, the first active layer side 710 is taken as a straightline for example, thereby allowing the slope between the body region 700and the first via hole region 701 to gradually decrease, as shown inFIG. 8A, the corner angle increases to an obtuse angle θ2 from θ1;wherein the corner angle θ2 is the angle between the first active layerside 710 and the side of the first via hole region 701 that is connectedto the first active layer side 710. Therefore, the first active layerside 710 widens the channel width of the active layer T3 a at thejunction, alleviates sudden resistance change at the junction, andimproves the precision of the pixel circuit compensation signal and thelight emitting current of the light emitting element, thereby improvingthe precision of the display screen. For example, as shown in FIG. 8A,the minimum channel width W′ corresponding to the first active layerside 710 is the same as the channel region width W of the thirdtransistor T3.

As shown in FIG. 8A, the active layer T3 a of the third transistor T3further includes a first complementary angle region 703 corresponding tothe side 701, and the first complementary angle region 703 includes thefirst active layer side 710. The first complementary angle region 703 isformed by extended the body region 700 toward the first via hole region701. For example, the first complementary angle region 703 istriangular, filled at the corner, and is integrated with the body region700 and the first via hole region 701; the first active layer side 710is linear. However, the shapes of the first complementary angle region703 and the first active layer side 710 are not limited in theembodiments of the present disclosure.

For example, as shown in FIG. 8A, the first electrode T3 s of the thirdtransistor T3 is electrically connected to the first via hole region 701through the via hole 401, and is electrically connected to the secondcapacitor electrode Cb through the via hole 403. The first complementaryangle region 703 may be made as large as possible to widen the channelwidth as much as possible on the premise of ensuring the manufacturingyield of the via hole.

For example, as shown in FIG. 8A, the active layer T3 a 0 of the thirdtransistor T3 has a minimum distance L0 from the via hole 403 at theside 710. For example, the minimum distance L0 is the minimum size thatsatisfies the design rule between the via hole and the routing line inthe manufacturing process of the display substrate 10, so as to ensurethe yield of the via hole and the routing line. The design rules relateto the process capability of the device, the process of fabricating thevia hole, the depth of the via hole, the thickness of the semiconductorlayer 504, or the like. For example, the minimum pitch L0 between thevia hole 403 and the orthographic projection of the first active layerside 710 on the base substrate 101 is 0.5 μm to 6 μm, for example 1 μmto 2 μm or 3 μm to 4 μm, for example 3.5 μm.

For example, as shown in FIG. 8A, in the first direction D1, the viahole 403 is overlapped with the first complementary angle region 703 andis not overlapped with the first via hole region 701.

For example, as shown in FIG. 8A, the first complementary angle region703 and the first via hole region 701 are located on both sides of thecenter line of the channel region of the third transistor T3 in thefirst direction D1 respectively. For example, as shown in FIG. 8A, thevia hole 403 is located on a side of the side 401 away from the centerline of the channel region of the third transistor in the firstdirection D1.

As shown in FIG. 8A, the body region 700 further includes a second viahole region 702 located on a side of the channel region T3 a 0 away fromthe first via hole region 701 in the first direction D1, and the secondvia hole region 702 is electrically connected to the second electrode T3s of the third transistor T3 through the via hole 206. For example, thesecond via hole region 702 may be a part or all of the second electrodecontact region T3 a 2 of the third transistor T3.

For example, referring to FIGS. 8A and 8B, the detection line segment131 and the second capacitor electrode Cb are in the same layer andinsulated from each other, the second electrode T3 s of the thirdtransistor T3 is electrically connected to the detection line segment131 through the via hole 202 to be connected to an external detectioncircuit, and the via hole 202 is located on a side of the via hole 206away from the channel region T3 a 0.

For example, when the substrate space allows, the active layer T3 a ofthe third transistor T3 may further include a second complementary angleregion 704 located at another corner where the body region 700 isconnected to the first via hole region 701, opposite to the firstcomplementary angle region 703.

FIG. 9A shows a sectional view of FIG. 7 along section line C-C′.Referring to FIGS. 7, 8B and 9A (also referring to FIGS. 11A and 11Btogether), the first capacitor electrode Ca and the second capacitorelectrode Cb are facing each other to form a first capacitor C1, thefirst capacitor electrode Ca and the third capacitor electrode Cc arefacing each other to form a second capacitor electrode C2, and thesecond capacitor electrode Cb and the third capacitor electrode Cc areelectrically connected through a via hole 403, that is, the storagecapacitor Cst includes the first capacitor C1 and the second capacitorC2 which are connected in parallel, so that the capacitance of thestorage capacitor Cst is increased. FIG. 9B shows a pixel circuitdiagram corresponding to the display substrate shown in FIG. 9A.

Referring to FIGS. 7 and 9A, the first electrode T2 s of the secondtransistor T2 is electrically connected to the first electrode contactregion Ta1 of the second transistor T2, the extension portion 180 andthe first capacitor electrode Ca through a via hole 800. The firstelectrode T2 s of the second transistor T2 is electrically connected tothe three parts through one via hole, which may reduce the occupiedlayout space and increase the wiring density and need not consider thedesign rule between via holes, compared with the case where the firstelectrode T2 s is electrically connected with the three parts throughplural via holes respectively, thereby increasing the pixel density.

Referring to FIGS. 7 and 9A, the first electrode T2 s of the secondtransistor T2 extends in the first direction D1, crosses the extensionportion 180 (intersects with the extension portion 180), and iselectrically connected with the first capacitor electrode Ca through thevia hole 800. For example, the via hole 800 extends in the firstdirection D1 and exposes a surface of the extension portion 180 and atleast portions of two side surfaces of the extension portion 180opposite in the first direction D1. The first electrode T2 s of thesecond transistor T2 includes a first portion S1, a second portion S2,and a third portion S3, the second portion S2 overlaps with theextension portion 180, and the first portion Si and the third portion S3are respectively on both sides of the second portion S2 in the firstdirection D1. For example, through the via hole 800, the first portionS1 is electrically connected to the first electrode contact region T2 a1 of the active layer T2 a of the second transistor T2, and the secondportion S2 is electrically connected with the extension portion 180 bydirect contact, which helps to increase the contact area and reduce theresistance; the third portion S3 is electrically connected to the firstcapacitor electrode Ca.

For example, referring to FIGS. 7 and 9A, the first electrode T2 s ofthe second transistor T2 extends in the first direction, and clads thetwo side surfaces of the extension portion 180 through the via hole 800,so that the first electrode T2 s of the second transistor T2 has alarger contact area with the extension portion 180, thereby reducing thecontact resistance of the first electrode T2 s and the extension portion180.

For example, referring to FIGS. 6B and 9A, the display substrate 20 mayfurther include a connection portion 720 overlapping with the extensionportion 180 in the direction perpendicular to the base substrate 101 andthe connection portion 720 is in the same layer as the first capacitorelectrode Ca. The connection portion 720 connects the first capacitorelectrode Ca and the first electrode contact region T2 a 1 of the secondtransistor T2 into an integrated structure. The connection portion 720is not conducted because it is shielded by the extension portion 180.When the second transistor T2 is turned on to transmit a data signalfrom the second electrode T2 d of the second transistor T2 to the firstelectrode T2 s thereof and the gate T1 g of the first transistor T1, theconnection portion 720 is turned on by the data signal in the extensionportion 180 and the first electrode T2 s of the second transistor T2above the connection portion, so that the first electrode T2 s of thesecond transistor T2 is electrically connected to the first capacitorelectrode Ca. In this way, a dual channel structure is formed betweenthe first electrode T2 s of the second transistor T2 and the firstcapacitor electrode Ca, which helps to reduce the channel resistance.

In addition, the first capacitor electrode Ca is connected with thefirst electrode contact region T2 a 1 of the second transistor T2 intoan integrated structure (refer to FIG. 6B) by the connection portion, sothat the first electrode contact region T2 a 1 of the second transistorT2 is also included in the range of the first capacitor electrode Ca,which enables the first capacitor electrode Ca to have a large area anda large overlapping area with the second capacitor electrode Cb, therebyincreasing the capacitance of the storage capacitor Cst.

For example, as shown in FIGS. 7 and 9A, the second capacitor electrodeCb may be at least partially overlapped with the first electrode contactregion T2 a 1 of the second transistor T2 in the direction perpendicularto the base substrate to have a larger overlapping area with the firstcapacitor electrode, so as to increase the capacitance of the storagecapacitor Cst. For example, the second capacitor electrode Cb is notoverlapped with the channel region T2 a 0 of the second transistor T2 inthe direction perpendicular to the base substrate 101, so as to avoidthe adverse effect of the potential of the second capacitor electrode Cbon the operation of the second transistor T2, for example, avoiding theproblems that the second transistor T2 may not be normally turned off,the leakage current is large, or the like, due to the potential of thesecond capacitor electrode Cb acting on the channel region T2 a 0 of thesecond transistor T2.

With the development of high-resolution display products, the pixeldensity of the display substrate is improved, and the structure in thedisplay substrate is greatly restricted by space. For example, thestorage capacitor Cst is limited by space, the capacitance may not beeasily increased, and the overlapping area of the capacitive electrodesdirectly affects the capacitance. Due to the influence of the alignmentbetween layers of the process equipment and the etching fluctuation(also referred to as CD Bias), the uniformity of the capacitance of thestorage capacitor between pixels is poor.

FIG. 10 schematically shows the influence of the storage capacitor Cston the sub-pixel. Referring to FIG. 1B, after the data signal DT iswritten into the gate node G of the first transistor T1 by the secondtransistor T2, in the process of the first control signal G1 changingfrom high level to low level, a change value of the first control signalG1 is AU. Since a capacitor Cgs exists between the gate and the firstelectrode of the second transistor T2, the capacitor Cgs is connected inseries with the storage capacitor Cst, and a coupling effect occurs, thevariation ΔVp of the pulled-down voltage at the gate node G of the firsttransistor T1 is: ΔVp (Cgs×ΔU)/(Cgs+Cst).

In the case where the process is determined, Cgs is a fixed value, andthe size and uniformity of the storage capacitor Cst may influence ΔVp,so as to influence the display image quality; that is, the difference instorage capacitor Cst among different sub-pixels may cause a moire(Mura) failure in the display image quality. As shown in FIG. 10, underthe same conditions, the storage capacitor Cst changes from 0.15 pF to0.16 pF, the data signal DT changes by 0.08V, and if a 10-bit driving isadopted, a variation of about 5 gray levels is caused, resulting inmoire of the display image quality.

In the display substrate 10 according to some embodiments of the presentdisclosure, a range of the orthogonal projection of the first capacitorelectrode Ca of the storage capacitor Cst on the base substrate 101 iswithin a range of the orthogonal projection of the second capacitorelectrode Cb on the base substrate 101, and a range of the orthogonalprojection of the third capacitor electrode Cc on the base substrate iswithin a range of the orthogonal projection of the first capacitorelectrode Ca on the base substrate 101. It should be noted that “theprojection range of A is within the projection range of B” in thepresent disclosure does not include the case where the edges of A and Bare partially or completely overlapped.

By designing the capacitor electrode of the storage capacitor Cst toindent at different layers, the display substrate according to at leastone embodiment of the present disclosure may improve the consistency andstability of the capacitances of the storage capacitors Cst in differentsub-pixels, solve the problem of non-uniform capacitance due toalignment and etching fluctuation, and finally improve the displayuniformity of a high-resolution (PPI) display product.

FIG. 11A is a partially schematic enlarged diagram of a storagecapacitor Cst in the display substrate according to an embodiment of thepresent disclosure, schematically illustrating a boundary of eachcapacitor electrode of the storage capacitor Cst in the second directionD2. FIG. 11B shows a sectional view of FIG. 11A along section line D-D′.

As shown in FIG. 11A, the first capacitor electrode Ca has a firstcapacitor electrode side Ca1 and a second capacitor electrode side Ca2along the first direction D1, and the first capacitor electrode sideCa10 and the second capacitor electrode side Ca2 are opposite to eachother in the second direction D2. The second capacitor electrode Cb hasa third capacitor electrode side Cb1 and a fourth capacitor electrodeside Cb2 along the first direction D1, and the third capacitor electrodeside Cb1 and the fourth capacitor electrode side Cb2 are opposite toeach other in the second direction D2. The third capacitor electrode Cchas a fifth capacitor electrode side Cc1 and a sixth capacitor electrodeside Cc2 along the first direction D1, and the fifth capacitor electrodeside Cc1 and the sixth capacitor electrode side Cc2 are opposite to eachother in the second direction D2. The first capacitor electrode sideCa1, the third capacitor electrode side Cb1 and the fifth capacitorelectrode side Cc1 are located on the same side of the sub-pixel, i.e.,a first side (left side in FIG. 11A), and the second capacitor electrodeside Ca2, the fourth capacitor electrode side Ca2 and the sixthcapacitor electrode side Cc2 are located on a second side (right side inFIG. 11A) of the sub-pixel opposite to the first side.

As shown in FIGS. 11A and 11B, an orthographic projection of the firstcapacitor electrode side Ca1 on the base substrate 101 is located at aninner side of the orthographic projection of the third capacitorelectrode side Cb1 on the base substrate 101, i.e., the side close tothe center line CL2 of the second capacitor electrode Cb in the firstdirection D1; an orthographic projection of the second capacitorelectrode side Ca2 on the base substrate 101 is located at an inner sideof an orthographic projection of the fourth capacitor electrode side Cb2on the base substrate 101, i.e., the side close to the center line CL2of the second capacitor electrode Cb in the first direction D1.

An orthographic projection of the fifth capacitor electrode side Cc1 onthe base substrate 101 is located at an inner side of an orthographicprojection of the first capacitor electrode side Ca1 on the basesubstrate 101, i.e., the side away from the third capacitor electrodeside Cb1; an orthographic projection of the sixth capacitor electrodeside Cc2 on the base substrate 101 is located at an inner side of anorthographic projection of the second capacitor electrode side Ca2 onthe base substrate 101, i.e., the side away from the fourth capacitorelectrode side Cb2.

Since the projection range of each capacitor electrode in the seconddirection D2 is within the projection range of the adjacent lowercapacitor electrode in the second direction and a certain margin isleft, even if there is misalignment or etching deviation when thecapacitor electrode is formed, it may be ensured that the capacitorelectrode and the adjacent lower capacitor electrode have a largeoverlapping area, which may alleviate the problem of non-uniformcapacitance due to the influence of misalignment and etchingfluctuation, and finally improve the display uniformity of the highresolution (PPI) display product.

As shown in FIGS. 11A and 11B, a pitch W1 is present between theorthographic projection of the first capacitor electrode side Ca1 on thebase substrate 101 and the projection of the third capacitor electrodeside Cb1 on the base substrate 101, and a pitch W3 is present betweenthe orthographic projection of the second capacitor electrode side Ca2on the base substrate 101 and the orthographic projection of the fourthcapacitor electrode side Cb2 on the base substrate 101; a pitch W2 ispresent between the orthographic projection of the fifth capacitorelectrode side Cc1 on the base substrate 101 and the projection of thefirst capacitor electrode side Ca1 on the base substrate 101, and apitch W4 is present between the orthographic projection of the sixthcapacitor electrode side Cc2 on the base substrate 101 and theorthographic projection of the second capacitor electrode side Ca2 onthe base substrate 101. For example, for an irregular capacitorelectrode pattern, the above-mentioned pitch is the minimum pitch.

For example, the center line of the orthographic projection of the firstcapacitor electrode Ca on the base substrate 101 in the first directionD1, the center line of the orthographic projection of the secondcapacitor electrode Cb on the base substrate 101 in the first directionD1, and the center line of the orthographic projection of the thirdcapacitor electrode Cc on the base substrate 101 in the first directionD1 coincide with one another; that is, W1=W3, W2=W4. Since theabove-mentioned alignment and etching deviations are usually symmetrical(as shown in FIG. 11C), such an arrangement may effectively improve thespace utilization rate.

Errors typically occur when each material layer is patterned to form apattern. For example, in the photolithography process, alignment errorseasily occur in the exposure phase; in the etching process, an actualsize of the pattern obtained by etching is less than a design value,leading to a difference (i.e., “CD bias”) between the design value andthe actual value. Therefore, in actual design, the above-mentionedpitches W1 and W2 are required to be designed in consideration of theabove-mentioned factors.

For example, the pitch W1 satisfies: W1≥a1+ (b1-b2) /2; wherein a1 is analignment error (absolute value) of the first capacitor electrode Ca tothe second capacitor electrode Cb in the second direction D2, b1 is adifference (also referred to as CD bias) (absolute value) between thedesign value and the actual value of the second capacitor electrode Cbin the second direction D2, and b2 is a difference (absolute value)between the design value and the actual value of the first capacitorelectrode Ca in the second direction D2.

For example, the pitch W2 satisfies: W2>a2+ (b2-b3) /2; wherein a2 is analignment error (absolute value) of the third capacitor electrode Cc tothe first capacitor electrode Ca in the second direction D2, b2 is adifference (absolute value) between the design value and the actualvalue of the first capacitor electrode Ca in the second direction D2,and b3 is a difference (absolute value) between the design value and theactual value of the third capacitor electrode Cc in the second directionD2.

With such an arrangement, in the case where the above-mentionedalignment error and etching fluctuation occur, the projection range ofthe first capacitor electrode Ca in the second direction D2 still fallswithin the projection range of the second capacitor electrode Cb in thesecond direction, and the projection range of the third capacitorelectrode Cc in the second direction D2 still falls within theprojection range of the first capacitor electrode Ca in the seconddirection, so that the capacitance change of the storage capacitor Cstin each sub-pixel due to the process fluctuation may be avoided, and thestability and the consistency of the capacitance of the storagecapacitor Cst are improved, thereby improving the display uniformity.

For example, FIG. 11C shows an alignment error when the first capacitorelectrode Ca is formed, and the projection range of the first capacitorelectrode Ca in the second direction D2 still falls within theprojection range of the second capacitor electrode Cb in the seconddirection, so that the overlapping area between the first capacitorelectrode Ca and the second capacitor electrode Cb is less affected, andthe stability and uniformity of the capacitance of the storage capacitorCst are improved.

At least one embodiment of the present disclosure further provides adisplay panel including any one of the above-mentioned displaysubstrates 10. It should be noted that, referring to FIG. 8B, theabove-mentioned display substrate 10 according to at least oneembodiment of the present disclosure may include the light emittingelement 125, or may not include the light emitting element 125; that is,the light emitting element 125 may be formed in a panel factory afterthe display substrate 10 is completed. In the case where the displaysubstrate 10 itself does not include the light emitting element 125, thedisplay panel according to the embodiment of the present disclosurefurther includes the light emitting element 125 in addition to thedisplay substrate 10.

For example, the display panel is an OLED display panel, andcorrespondingly, the display substrate 10 included therein is an OLEDdisplay substrate. As shown in FIG. 12, for example, the display panel20 further includes an encapsulation layer 801 and a cover plate 802disposed on the display substrate 10, and the encapsulation layer 801 isconfigured to seal the light emitting element on the display substrate10 to prevent damages to the light emitting element and the drivecircuit due to penetration of external moisture and oxygen. For example,the encapsulation layer 801 includes an organic thin film or a structurein which an organic thin film and an inorganic thin film are alternatelystacked. For example, a water absorption layer (not shown) may befurther disposed between the encapsulation layer 801 and the displaysubstrate 10, configured to absorb water vapor or sol remaining in thelight emitting element during the previous manufacturing process. Thecover plate 802 is, for example, a glass cover plate. For example, thecover plate 802 and the encapsulation layer 801 may be integrated witheach other.

At least one embodiment of the present disclosure further provides adisplay device 30. As shown in FIG. 13, the display device 30 includesany one of the above-mentioned display substrate 10 or display panel 20,and the display device in this embodiment may be any product orcomponent with a display function, such as a display, an OLED panel, anOLED television, electronic paper, a mobile phone, a tablet computer, anotebook computer, a digital photo frame, a navigator or the like.

At least one embodiment of the present disclosure further provides amanufacturing method of the above-mentioned display substrate. Themethod for manufacturing a display substrate according to an embodimentof the present disclosure will be exemplarily described below withreference to FIGS. 2A, 6A to 6D, but the embodiment of the presentdisclosure is not limited thereto.

The manufacturing method includes the following steps S61-S65.

Step S61: forming a first conducting material layer and performing apatterning process on the first conducting material layer to form afirst conductive layer 501 as shown in FIG. 6A, i.e., to form adetection line segment 131, a power line segment 141, and a secondcapacitor electrode Cb of the storage capacitor Cst, which are insulatedfrom one another.

Step S62: forming a first insulating layer 102 on the first conductivelayer 501 and forming a semiconductor material layer on the firstinsulating layer, the semiconductor material layer being subjected to apatterning process to form a semiconductor layer 504 as shown in FIG.6B, i.e., to form an active layer T1 a of the first transistor T1, anactive layer T2 a of the second transistor T2, and an active layer T3 aof the third transistor T3 which are spaced apart from one another.

Step S63: forming a second insulating layer 103 on the semiconductorlayer 504 and forming a second conducting material layer on the secondinsulating layer, the second conducting material layer being patternedto form a second conductive layer 502 as shown in FIG. 6C, i.e., to forma gate T1 g of the first transistor T1, a gate T2 g of the secondtransistor T2, and a gate T3 g of the third transistor T3, which areinsulated from one another.

For example, as shown in FIG. 6C, the second conductive layer 502further includes a first scan line 150 and a second scan line 160insulated from each other.

For example, the first scan line 150 is integrated with the gate T2 g ofthe second transistor T2 of one corresponding row of sub-pixels, and thesecond scan line 160 is integrated with the gate T3 g of the thirdtransistor T3 of one corresponding row of sub-pixels.

Step S64: conducting (for example, doping) the semiconductor layer 504by using the second conductive layer 502 as a mask through aself-alignment process, so that the portion of the semiconductor layer504 not covered by the second conductive layer 502 is conducted, therebyobtaining the first capacitor electrode Ca, and the portions of theactive layer of each transistor on both sides of the channel region areconducted to form a first electrode contact region and a secondelectrode contact region respectively, which are configured to beelectrically connected to the first electrode and the second electrodeof the transistor respectively. FIG. 6B shows the first and secondelectrode contact regions T1 a 1 and T1 a 2 of the active layer T1 a ofthe first transistor T1, the first and second electrode contact regionsT2 a 1 and T2 a 2 of the active layer T2 a of the second transistor T2,and the first and second electrode contact regions T3 a 1 and T3 a 2 ofthe active layer T3 a of the third transistor T3.

For example, before the semiconductor layer 204 is conducted, an etchingprocess is performed on the second insulating layer 103, so that theregion of the second insulating layer 103 not covered by the secondconductive layer 502 is completely etched, that is, the secondinsulating layer 103 and the second conductive layer 502 coincide in thedirection perpendicular to the base substrate 101. In this way, when theregion of the semiconductor layer 504 not covered with the secondconductive layer 502 is conducted by ion implantation, the implantedions may not be blocked by the second insulating layer 103.

Step S65: forming a third insulating layer 104 on the second conductivelayer 502, and forming a third conducting material layer on the thirdinsulating layer 104, and performing a patterning process on the thirdconducting material layer to form a third conductive layer 503 as shownin FIG. 6D, i.e., to form a first electrode T1 s and a second electrodeT1 d of the first transistor T1, a first electrode T2 s and a secondelectrode T2 d of the second transistor T2, and a first electrode T3 sand a second electrode T3 d of the third transistor T3.

For example, the second conductive layer further includes a data line110, an auxiliary electrode line 120, a first detection line 130, and afirst power line 140 insulated from one another.

For example, as shown in FIG. 6D, the first power line 140 is integratedwith the second electrode T1 d of the first transistor T1 in the(nearest) sub-pixel directly adjacent thereto. For example, each dataline 110 is integrated with the second electrode T2 d of the secondtransistor T2 in the sub-pixel connected thereto.

This forms a structure of the sub-pixel shown in FIG. 2A.

For example, the material of the semiconductor material layer includes,but not limited to, silicon-based materials (amorphous silicon a-Si,polysilicon p-Si, etc.), metal oxide semiconductors (IGZO, ZnO, AZO,IZTO, etc.), and organic materials (hexathiophene, polythiophene, etc.).

For example, the material of the above-mentioned first conductingmaterial layer, second conducting material layer, and third conductingmaterial layer may include gold (Au), silver (Ag), copper (Cu), aluminum(Al), molybdenum (Mo), magnesium (Mg), tungsten (W), and an alloymaterial formed by combining the above metals; or a transparentconductive metal oxide material such as Indium Tin Oxide (ITO), IndiumZinc Oxide (IZO), zinc oxide (ZnO), zinc aluminum oxide (AZO), etc.

For example, the first insulating layer 102, the second insulating layer103, and the third insulating layer 104 are inorganic insulating layers,for example, oxide of silicon, nitride of silicon or oxynitride ofsilicon, such as silicon oxide, silicon nitride, silicon oxynitride, oran insulating material including a metal oxynitride, such as aluminumoxide, titanium nitride, or the like. For example, the insulating layersmay also be made of organic materials, such as Polyimide (PI), acrylate,epoxy, polymethyl methacrylate (PMMA), or the like. The embodiments ofthe present disclosure are not limited thereto.

For example, the above-mentioned patterning process may include aconventional photolithography process, including, for example, coating,exposing, developing, baking, etching, or the like of a photoresist.

What have been described above are only specific implementations of thepresent disclosure, the protection scope of the present disclosure isnot limited thereto. The protection scope of the present disclosureshould be based on the protection scope of the claims.

What is claimed is:
 1. A display substrate, comprising a base substrateand a plurality of sub-pixels on the base substrate, wherein theplurality of sub-pixels are arranged in a plurality of sub-pixel columnsin a first direction and a plurality of sub-pixel rows in a seconddirection, the first direction intersecting with the second direction,at least one of the plurality of sub-pixels comprises a firsttransistor, a second transistor, a third transistor, and a storagecapacitor on the base substrate, a first electrode of the secondtransistor is electrically connected to the first capacitor electrode ofthe storage capacitor and a gate electrode of the first transistor, asecond electrode of the second transistor is configured to receive adata signal, a gate electrode of the second transistor is configured toreceive a first control signal, and the second transistor is configuredto write the data signal to the gate electrode of the first transistorand the storage capacitor in response to the first control signal, afirst electrode of the first transistor is electrically connected to asecond capacitor electrode of the storage capacitor and configured to beelectrically connected to a light emitting element, a second electrodeof the first transistor is configured to receive a first power voltage,and the first transistor is configured to control a current for drivingthe light emitting element under control of a voltage of the gateelectrode of the first transistor, a first electrode of the thirdtransistor is electrically connected with the first electrode of thefirst transistor and the second capacitor electrode of the storagecapacitor, a second electrode of the third transistor is configured tobe connected with a detection circuit, a gate electrode of the thirdtransistor is configured to receive a second control signal, and thethird transistor is configured to detect an electrical characteristic ofthe sub-pixel to which the third transistor belongs by the detectioncircuit in response to the second control signal; the first electrode ofthe third transistor is electrically connected to an active layer of thethird transistor through a first via hole, and the first electrode ofthe third transistor is configured to be electrically connected to thelight emitting element through a second via hole; the first via hole andthe second via hole are at least partially overlapped with each other ina direction perpendicular to the base substrate.
 2. The displaysubstrate according to claim 1, wherein the first electrode of the thirdtransistor is electrically connected to the second capacitor electrodethrough a third via hole.
 3. The display substrate according to claim 2,wherein the third via hole and the active layer of the third transistorare not overlapped in the direction perpendicular to the base substrate.4. The display substrate according to claim 3, wherein a minimumdistance between an orthographic projection of the third via hole on thebase substrate and an orthographic projection of the active layer of thethird transistor on the base substrate ranges from 0.5 μm to 6 μm. 5.The display substrate according to claim 2, wherein the first electrodeof the third transistor is further electrically connected to the secondcapacitor electrode through the first via hole.
 6. The display substrateaccording to claim 2, wherein the third via hole is not overlapped withthe first capacitor electrode in the direction perpendicular to the basesubstrate, and a minimum distance between an orthographic projection ofthe third via hole on the base substrate and an orthographic projectionof the first capacitor electrode on the base substrate ranges from 0.5μm to 6 μm.
 7. The display substrate according to claim 2, wherein inthe first direction, the first via hole and the third via hole are on asame side of the first capacitor electrode, and are on an opposite sideof the first capacitor electrode to the first transistor.
 8. The displaysubstrate according to claim 2, wherein a center of the first via holeand a center of the third via hole are respectively on both sides of acenter line of a channel region of the third transistor in the firstdirection.
 9. The display substrate according to claim 1, wherein thefirst capacitor electrode, an active layer of the first transistor, anactive layer of the second transistor, and the active layer of the thirdtransistor are all in a same layer; the first capacitor electrode andthe active layer of the first transistor are in an integral structure;and the first capacitor electrode, the active layer of the secondtransistor, and the active layer of the third transistor are insulatedfrom one another.
 10. The display substrate according to claim 1,wherein the second capacitor electrode is located on a side of an activelayer of the first transistor close to the base substrate, anorthographic projection of the second capacitor electrode on the basesubstrate covers an orthographic projection of the active layer of thefirst transistor on the base substrate.
 11. The display substrateaccording to claim 1, wherein the storage capacitor further comprises athird capacitor electrode, and the third capacitor electrode, the firstelectrode of the first transistor and the second electrode of the thirdtransistor are in an integral structure.
 12. The display substrateaccording to claim 11, wherein the third capacitor electrode is on aside of the first capacitor electrode away from the base substrate, thesecond capacitor electrode is on a side of the first capacitor electrodeclose to the base substrate, and the first capacitor electrode is atleast partially overlapped with both the second capacitor electrode andthe third capacitor electrode in the direction perpendicular to the basesubstrate respectively.
 13. The display substrate according to claim 1,wherein, in the first direction, the first transistor and the secondtransistor are both disposed on a same side of the first capacitorelectrode as the first via hole and on an opposite side of the firstcapacitor electrode to the third transistor.
 14. The display substrateaccording to claim 1, wherein channel length directions of the firsttransistor, the second transistor and the third transistor are parallelto one another, and are all parallel to the first direction.
 15. Thedisplay substrate according to claim 1, wherein the active layer of thethird transistor comprises a channel region, a first electrode contactregion, and a second electrode contact region, and the first electrodecontact region is electrically connected to the first electrode of thethird transistor through the first via hole; a center line, which isalong the first direction, of a channel region of the third transistorcoincides with a center line which is along the first direction, of thesub-pixel.
 16. The display substrate according to claim 1, wherein thefirst transistor and the second transistor are respectively on bothsides of a center line, which is along the first direction, of thesub-pixel.
 17. The display substrate according to claim 1, furthercomprising a plurality of data lines extended in the first direction,wherein the plurality of data lines are electrically connected with theplurality of sub-pixels columns in a one-to-one correspondence, and eachof the plurality of data lines is electrically connected with the secondelectrodes of the second transistors in one corresponding sub-pixelcolumn to provide the data signal.
 18. The display substrate accordingto claim 17, wherein each of the plurality of data lines and the secondelectrodes of the second transistors connected with the each data lineare in an integral structure.
 19. A display device comprising thedisplay substrate according to claim 1 and the light emitting element,wherein the first electrode of the third transistor is electricallyconnected to the light emitting element through the second via hole. 20.A method for manufacturing a display substrate, comprising forming aplurality of sub-pixels on a base substrate, wherein the plurality ofsub-pixels are arranged into a sub-pixel array in a first direction anda second direction, the first direction intersecting with the seconddirection, at least one of the plurality of sub-pixels comprises a firsttransistor, a second transistor, a third transistor, and a storagecapacitor on the base substrate, a first electrode of the secondtransistor is electrically connected to the first capacitor electrode ofthe storage capacitor and a gate electrode of the first transistor, asecond electrode of the second transistor is configured to receive adata signal, a gate electrode of the second transistor is configured toreceive a first control signal, the second transistor is configured towrite the data signal to the gate electrode of the first transistor andthe storage capacitor in response to the first control signal, a firstelectrode of the first transistor is electrically connected to a secondcapacitor electrode of the storage capacitor and configured to beelectrically connected to a light emitting element, a second electrodeof the first transistor is configured to receive a first power voltage,the first transistor is configured to control a current for driving thelight emitting element under control of a voltage of the gate electrodeof the first transistor, a first electrode of the third transistor iselectrically connected with the first electrode of the first transistorand the second capacitor electrode of the storage capacitor, a secondelectrode of the third transistor is configured to be connected with adetection circuit, a gate electrode of the third transistor isconfigured to receive a second control signal, and the third transistoris configured to detect an electrical characteristic of the sub-pixel towhich the third transistor belongs by the detection circuit in responseto the second control signal; the first electrode of the thirdtransistor is electrically connected to an active layer of the thirdtransistor through a first via hole, and the first electrode of thethird transistor is configured to be electrically connected to the lightemitting element through a second via hole; the first via hole and thesecond via hole are at least partially overlapped with each other in adirection perpendicular to the base substrate.